中古 NOVELLUS CONCEPT 2 Altus #9171171 を販売中

Chemical vapor deposition (CVD) system, 8" Process: CVD - Tungsten dep Module configuration: Standard Wafer type: Notch Module type: CVDW SMIF Type (2) Chambers Software: QNX2 / 4 Module controller: MC2 Pedestal assembly type: Ped assy, 200mm MORE, D, no flat, SEMI 0 Exclusion ring type: MOER 0 Exclusion ring lift type: 02-054427-01 0 DLCM Configuration: DLCM Type: Shrink Cassette interface: Platform Robot type: Mag7 (P/N: 003-1600-25) Arm set: Dual arm (P/N: 002-0016-14) Cool station: 3-Level Pressure gauge: Capacitance manometer, MKS (P/N: 750B12TCE2GK), 100Torr MYCROLIS Throttle valve MKS 651D-16202 Throttle valve controller ANIMATICS CDP2407-2 Indexer controller Slit gate valve (Chamber A, B): 02-121427-00, SMC, XGT-0402AWM-X16 Rev8 Slit gate valve (Loadlock A, B): 02-133793-00, SMC, XGT-0101AWM-X16 Rev1 Chamber configuration: Chamber A CVD - Tungsten Chamber B CVD - Tungsten Pedestals: 200 mm MOER: Pedestal 1 Pedestal 2-5 Clean: Insitu Millipore MDVX-100B Throttle valve 27-053468-00 Throttle valve controller VAT 14040-PE34-0003 Gate valve Pressure gauge: 100 Torr (Milipore, CDLD2106E), Backside 100 Torr (Milipore, CDLD2106E) 10 Torr (Milipore, CDLD1106E) RF Match: Trazer, AMU2-1 RF Configuration: HF RF Generator type: AE RFG 3000 MFC Size & Gas type: Chamber A: MFC1 / SLM / Ar MFC2 / 50SCCM /SiH4 MFC3 / 20SLM / H2 MFC4 / 20SLM / Ar MFC5 / 500SCCM/ WF6 MFC6 / 2SLM / C2F6 MFC7 / 2SLM / O2 MFC8 / 10SLM / Ar MFC9 / 20SLM / H2 MFCC / 2SLM / Ar MFCD / 20SLM / Ar MFCE / 500SCCM / WF6 UPC1 / SLM / Ar Chamber B: MFC1 / SLM / Ar MFC2 / 50SCCM /SiH4 MFC3 / 20SLM / H2 MFC4 / 20SLM / Ar MFC5 / 500SCCM/ WF6 MFC6 / 2SLM / C2F6 MFC7 / 2SLM / O2 MFC8 / 10SLM / Ar MFC9 / 20SLM / H2 MFCC / 2SLM / Ar MFCD / 20SLM / Ar MFCE / 500SCCM / WF6 UPC1 / SLM / Ar 2001 vintage.