ID: 293767229
ヴィンテージ: 2017
CVD System
Process: Aldox
(4) Loadports
EDWARDS iGX6/100L Vacuum pump
EDWARDS Atlas-6-MK4 TCS600 System
Gases with chamber:
Chamber 1: N2, O2, Ar, He, NF3, N2O
Chamber 2: N2, O2, Ar, He, NF3, N2O
Chamber 3: N2, O2, Ar, He, NF3, N2O
2017 vintage.
