中古 LAM RESEARCH / NOVELLUS CONCEPT 2 Sequel Express #293822308 を販売中
URL がコピーされました!
ID: 293822308
ウェーハサイズ: 6"
ヴィンテージ: 2007
System, 6"
Dual loadlock
Double‑sided handling robot
Dual process chambers
C2‑DLCM‑S MKS ASTRON Process сhamber
SEQUEL-X M00A Process chamber
(2) MKS ASTRON AX7645PS‑01 power supplies
(2) ADVANCED ENERGY RFG 5500 RF generators
(2) ADVANCED ENERGY PDX 1400 MF generators
(2) EDWARDS EPX180L vacuum pumps
(2) EDWARDS iXH1210H vacuum pumps
Power cabinet
Control computer
Power supply: 208 V, 50/60 Hz, 3 Phase
2007 vintage.
まだレビューはありません