中古 KE (HIKE) DD853-J2-DIF301 #9133308 を販売中

System, 8" Gas supply: Bottom PCW Supply: Top Boat operation: 1 Boat system Load lock: Non load lock Carrier slot: 25 Slot Main controller/software version: CX3002(J2) Operation screen: touch screen Gas flow chart: standard Temperature controller: CQ1600 Controller power: 1Φ120V 40A Heater power: 1Φ 208V 225A Process gas 1 N2 30SLM Process gas 2 H2 5SLM Process gas 3 D2 20SLM Process gas 4 D2 10SLM Process gas 5 H2 5SLM Basic style: normal Tubing material: SUS-316L Tubing finish: VCR Wafer alignment: standard Cassette storage qty: upper 10, sub 4, lower 8 Cassette I/O port: standard Cassette handling robot: standard Wafer transfer type: 1+4 Fork material: ceramic Fork qty: 5 Fork variable pitch: standard Fork wafer presence sensor: standard Boat elevator: standard Auto shutter: standard Boat rotation: standard Mechanical parts: standard Heater zone: 4 Zone Heater temp: 350~450℃ TC type: R type Spike T/C: R type Overtemp protect T/C: R type Door interlock: standard Heater exhaust: standard Gas box exhaust: standard Process exhaust: standard Signal light tower: 3 Color signal light tower including red light Top light color: red Second light color: green Third light color: yellow 1999 vintage.