中古 APPLIED MATERIALS P 5000 Mark II #67130 を販売中

Metal etch system, 6" Configuration details: Precision 5000 Mark II MxP Etch system 6” Mark II mainframe containing load lock chamber Cassette to cassette wafer handling VME system controller with hard disk and floppy disk storage 28 line compatible on-board gas panel Bolt down load lock chamber lid and load lock purge system Microprocessor controller including CRT display, self diagnostics, host computer interface via RS232 port SECS II protocol Standard floppy and hard disc (170NMB) storage Etch chambers include: Temperature controlled pedestal Magnet modules and cylinder lift mechanisms Slit valve, gas distribution components RF isolator, RF match Capacitance manometer, throttle valve Independent helium cooling Integrated end point detector Remote package including pumps, RF power supplies, heat exchanger, NESLAB recirculator, main AC box and other facilities Fifty foot remote package cable length Features: (2) metal etch chambers and one strip chamber system Chamber A: 6” clamped metal etch process kit Chamber B: 6” clamped metal etch process kit Chamber C & D: 6” advanced strip and passivation chamber Including 1200 Watt generator process kit, hardware gas distribution plate and MFC controller gas line per chamber 6” metal etch process kit with: AL etch ceramic fingered basic kit 0240-31587E 0.95” fingered ceramic focus ring 0240-09757E Tapered head SiC DC Pick-ups 0240-31359 Unilid gas distribution plate - 119holes 0020-32259 6” advanced strip and passivation chamber process kit basket style wafer support Gas panel A&B: BCL3, Cl2, CF4, N2, SF6 / C: O2, N2, H2O Through the wall system Heat Exchanger AMAT 1 and Heat Exchanger AMAT0 (1) NESLAB HX150 is missing (1) etch chamber is leaking glycol (can be repaired but it is better to change the body chamber) Second chamber has been repaired for the same problem Machine was in production until Q3 2009 Currently installed in fab Gases are purged and the machine is powered off Can be inspected and powered on to see software only Spare parts available, list is shown in photos 1998 vintage.