中古 AMAT / APPLIED MATERIALS P5000 MxP+ #9177952 を販売中

System, 8" Chamber type Process Ch-A: Mxp Metal etch Ch-B: MxP Metal etch Ch-C: ASP P/R Strip Process kit Manometer Ch-A: Metal STD 1 Torr/MKS Ch-B: Metal STD 1 Torr/MKS Ch-C: Qtz 10 Torr/MKS Clean method Throttle valve Ch-A: RF Clean Yes Ch-B: RF Clean Yes Ch-C: - Yes Turbo pump Magnet driver Ch-A: Yes Yes Ch-B: Yes Yes Gas box MFC Gas name Ch-A: Yes - Ch-B: Yes - Ch-C: Yes - VME Type: HDD: Yes Controller slot: (21) Slots SBC Board type: SV21 Synagy Boss rom ver: Boss 4.8 Video board type: VGA Video FDD: 3.5" Robot type: Phase III Cassette handler: Phase III (top clamp) Sto elevator type: (8) Slots I/O Wafer sensor: Yes WPS Sensor: Yes L/Lock slow vent: Yes Slit valve type: Standard L/Lock purge: Yes RF Gen I/II type RF Match Ch-A: OEM 12A Phase VI Ch-B: OEM 12A Phase VI Ch-C: AX2115 Manual match EPD: E2.8 Exhaust line: Top, standard EPD Method: Monocrometer Gas panel: (12) Gas lines Monitor: TTW Mini controller: No H/E: AMAT 0 Chiller: NESLAB 1993 vintage.