中古 AMAT / APPLIED MATERIALS Endura CL #293752793 を販売中
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ID: 293752793
ウェーハサイズ: 12"
ヴィンテージ: 2002
PVD Metal system, 12"
AMAT / APPLIED MATERIALS 0190-08815 622000096-1 Endura CVCF
AMAT / APPLIED MATERIALS 0015-04420 DI Chiller
EFEM:
(3) AMAT / APPLIED MATERIALS 85-3000-0307-01 Load ports
YASKAWA XU-RCM6801 G28001-1-14 Handler robot
YASKAWA XU-CN1112A S2M988-5-02 Robot controller
YASKAWA XU-ACL4203 S13537-3-01 Ball screw
TERA TVC-1R-01 AB11110361 Remote controller
AMAT / APPLIED MATERIALS 0190-05111 Control video switch
(3) MAXON 143849 DC Servo motors
(3) KG AUTO KGP-JD2G LED Lamps
MOELLER PKZM0-25 Thermal magnetic circuit breaker
TM:
AMAT / APPLIED MATERIALS DDM-005X-DN-AM3 9101-1999 Electrocraft servo drive
AMAT / APPLIED MATERIALS 404419R Enhanced HT Wrist
AMAT / APPLIED MATERIALS 404557R 0010-31156 Enhanced HT Wrist
AMAT / APPLIED MATERIALS 0040-50505-002 13118101-203 Slit valve housing
AMAT / APPLIED MATERIALS 0010-22609 119503 Slit valve
AMAT / APPLIED MATERIALS 0010-1041-01R KSM-060206 Slit valve
GRANVILLE 354001 1559 Gauge controller
CTI 8113212G001 F0908552 On-board P300 Module
CTI 8113212G001 H1009443 On-board P300 Module
MDC AV-153-P 01-53564 Pneumatic angle valve
PANASONIC FX-300 Series Digital fiber optic sensor
NSK M-JSG014DN504 GJ6Y062 Mega torque motor
AMAT / APPLIED MATERIALS XBR-2310 AC Servo motor
Chamber 1:
CTI PG03.00 L05407998 On-board P300 Cryopump
CTI 8113212G001 B0908336 On-board P300 Module
AMAT / APPLIED MATERIALS CDS-099 400822-PJ-LCMD Lower chamber module
AMAT / APPLIED MATERIALS 0010-09628 1096800
SPELLMAN X2784 41254-1-A01063 Power supply
AMAT / APPLIED MATERIALS 18902-13 400822-PJ-CCMD Controller
Chamber 2:
CTI 8116250G001 F03151808 On-board P300 Cryopump
CTI 8113212G001 E0807402 On-board P300 Module
8127303G001 Drive unit assembly P300
MDC AV-150M-P03 02-55365 Pneumatic angle valve
MKS Baratron 627A1TBD 821109 Pressure transducer
AMAT / APPLIED MATERIALS 0021-21164 11362101 Bracket, sensor, shutter
Chamber 3:
AMAT / APPLIED MATERIALS 0010-14529 3420304 PVD Source chamber top
AMAT / APPLIED MATERIALS MII-403-0606 404557-PJ-LCM1 300mm RPC Assembly
MKS Baratron 627A 1TBD 001057274 Pressure transducer
SMC 1082300 B11262002-29832 Valve supplier
R.T.LAIRD INC 188123 1-800-231-7983
SVF 0010-13532 300637-3103-31030004 Flow control
AMAT / APPLIED MATERIALS 0090-00412 S03-36-19 Motor stepper assy
AMAT / APPLIED MATERIALS 0040-06374 11362101 Motor stepper assy
MKS UHV-25-AKC-ENVN 0325476992 Angle valve
CORCOM F7299 EMI filter
Degas chamber (Chamber E):
CTI 8116273G001 1010CHE10707 On-board P300 Cryopump
CTI 8113212G001 C0908419 On-board P300 Module
AMAT / APPLIED MATERIALS 0010-21740 Assy TC amp
7018012 TC Gauge
Degas chamber (CH-F):
CTI 8116273G001 I05376835 On-board P300 Cryopump
CTI 8113212G001 C0908416 On-board P300 Module
AMAT / APPLIED MATERIALS 0010-21740 Assy TC amp
SMC&AMAT / APPLIED MATERIALS NCDQ2WB63-UIA97 0110 Pneumatic cylinder
SMC&AMAT / APPLIED MATERIALS NCDQ2B80-UIA990939 3020-01052 Pneumatic cylinder
SMC&AMAT / APPLIED MATERIALS 944AOPLPNCSFSFF 42600719 Pneumatic cylinder
SMC&AMAT / APPLIED MATERIALS NCDQ2WB63-UIA97 939 Pneumatic cylinder
SMC&AMAT / APPLIED MATERIALS 0040-76520 300351-333-0023 Pneumatic cylinder lift assembly
CTI 8112030G002 Roughing valve
Diaphragm valve
8127082-G001 Purge valve
Generator rack:
ENI 0190-19810 DCG-400Z-0J Master DC Power supply
ENI 0190-07969 DCG-200Z-S0J Slave DC Power supply
ENI 0190-09832 GHW12Z-13DF2N0-001 RF Generator
CVCF:
Eaton MDL3800F 4203B99G03 Circuit breaker
AMAT / APPLIED MATERIALS 400822-PJ-PROJ 0190-06075 Load center
2002 vintage.
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