中古 AMAT / APPLIED MATERIALS Endura 5500 #9015795 を販売中

PVD System, 8" Cleanroom Interface: Endura VHP Front Panel PVD Endura Type Controller PVD Endura Type Remote Generator Rack Secondary Generator Rack: (2) 9600 System Cryo Compressors Transfer & Buffer Lid Hoist CE Mark CHAMBER A Pass-Through Chamber Quartz Viewport Lid CHAMBER B Cooldown with Temperature Monitor Quartz Viewport Lid O2 Manifold CHAMBERS C/D (2) Reactive Preclean (RPC) Chambers Preclean UHV Pump Options: Leybold TMP Preclean Smart Pump Interface Kit CHAMBER E/F (2) Orienters with Enhanced Degas TRANSFER ROBOT VHP Robot BUFFER ROBOT HP Robot SYSTEM PUMP OPTION CTI Enhance Fast Regen Low Vibration 3-Phase Cryo - One Each for Transfer & Buffer Chambers SYSTEM PUMP/INTERFACE COMBINATION System Smart Pump Interface Kit (Subject to Availability) CHAMBER 2 Refractory Widebody PVD SIP Ta(N) Chamber Power Supply Options: 24 kW Two Box, Power Supply Mini Panel PVD Wafer Chuck Options: SZBESC style e-chuck Shield Material: Stainless Steel two-piece CHAMBER 3 Widebody PVD SIP Cu Chamber PVD Power Supply Options: 40kW 2 box with Arc Out, Power Supply Mini Panel PVD Wafer Chuck Options: SLT ESC Ceramic Cover Ring Both CHAMBER 2/3 have the following options: PVD UHV Pump Options CTI Enhanced Fast Regen Low Vibration 3-phase Cryo Wafer Bias Power Supply: IMP 13.56MHz Bias Power Supply H/W 3-Position Gate Valves Standard Cryo Restrictors Chamber Conditioning Options: Mag-Coupled Shutter Configuration: Endura Electra Cu.