中古 AMAT / APPLIED MATERIALS Endura 5500 HP #9223524 を販売中

PVD System, 8" Multi-chamber sputtering system Process: Copper Dry pump type: EBARA AA40W (System) LLA LLB (2) Al (2) Ta PVD (2) PCII (2) DG System controller SMIF System: (2) LPT 2200 (2) Load locks Handler system: Buffer Hp Transfer VHp (2) Hoisters Process chambers: (2) ImpTa (2) ClampAl (2) PcII (2) Degas Main AC NESLAB Chiller (3) General racks (2) Compressors (4) EBARA Pumps Chamber 1: B101 IMP Ta Shutter disk Body type: WB Source type: Vectra IMP Magnet type: RH-2 MFCs: Ar 140sccm DC Generator: ADVANCED ENERGY MDX-L6 RF Generator: ADVANCED ENERGY HFV8000 (RF Coil) COMDEL CX-600S (AC Bias) RF Match: HE BIAS Vectra IMP 010CAP 2MHz (RF Coil) 13.56 MHz (AC Bias) Cryo Pump: CTI On-Board 8F No turbo pump Chamber 2 & 3: Clamp Al Body type: WB Source type: 12.9'' Magnet type: Al A, 12.9'' DC Generator: ADVANCED ENERGY MDX-L12M MFCs: Ar 140sccm Ar-H 70sccm Cryo pump: CTI On-board 8F No shutter disk No RF Generator No RF Match No turbo pump Chamber: 4 B101 IMP Ta Shutter disk Body type: WB Source type: Vectra IMP Magnet type: RH-2 MFCs: Ar 140 sccm ADVANCED ENERGY MDX-L6 DC Generator RF Generator: ADVANCED ENERGY HFV8000 RF Coil COMDEL CX-600S AC Bias RF Match: HE BIAS Vectra IMP 010CAP 2MHz (RF Coil) 13.56MHz (AC Bias) Cryo pump: CTI On-board 8F No turbo pump Chamber A & B: Cool down Dry pump: EBARA AA20N Pedestal type: Clncool Chamber C & D: PCII Process: Etch PK Type: PIKII Pinless Dry pump: EBARA AA20N Turbo pump: LEYBOLD TMP RF Generator: COMDEL CPS1001S 13.56MHz RFPP LF10A 400KHz RF Match: PC II 13.56MHz MFCs: Ar 28sccm Ar 420sccm No DC Generator No cryo pump Chamber E & F: O/D Degas type: Standard Buffer & Transfer: Cryo pump: CTI On-board 8F Robot type: HP Load lock: Body type WB Venting & pumping mode: Soft slow Fast Wafer mapping: Standard No scrubber / CDO Heat exchanger: NESLAB III (PVD Chm) Cryo compressor: Water cooled 9600 CIM Linked.