中古 AMAT / APPLIED MATERIALS Centura MxP+ #9115015 を販売中

Poly etcher, 8" Wafer shape: JMF flat 208 V, 400A, 60 Hz Centura type: Centura 1 No SMIF interface Chamber A: MXP+ Chamber B: MXP+ Chamber C: MXP+ Chamber D: Empty Chamber E: Empty Chamber F: Orient Buff robot type: HP, metal blade Narrow body loadlock Standard Wafer sensor Water detector alarm Smoke detector alarm Monitor & EDP monitor: Wall mount AC Rack types: Phase 1 AC Rack MF Facilities: Bottom EMO's: Turn to release Control rack type: Phase 1 controller Chamber A: MXP+ Polymide ESC MKS640 IHC 1 Torr manometer Quick release lid Vitron slit valve o-ring Standard bias RF match OEM 12B RF gen bias No Autobias Monochrometer endpoint system ENDP30 endpoint software SEIKO SEIKI 301 turbo pump Magnet driver full installed Chamber pump not included Simply cathode type Butterfly throttle valve Vat gate valve Process kit not included Gas 1: CF4, 100, STEC SEC-4400MC Gas 2: CHF3, 300, STEC SEC-4400MC Gas 3: O2, 50, STEC SEC-4400MC Gas 4: O2, 200, STEC SEC-4400MC Gas 5: AR, 100, STEC SEC-4400MC Gas 6: N2, 100, STEC SEC-4400MC Chamber B: MXP+ Polymide ESC MKS640 IHC 1 Torr manometer Quick release lid Vitron slit valve o-ring Standard bias RF match OEM 12B RF gen bias No Autobias Monochrometer endpoint system ENDP30 endpoint software SEIKO SEIKI 301 turbo pump Magnet driver full installed Chamber pump not included Simply cathode type Butterfly throttle valve Vat gate valve Process kit not included Gas 1: CF4, 100, STEC SEC-4400MC Gas 2: CHF3, 300, STEC SEC-4400MC Gas 3: O2, 50, STEC SEC-4400MC Gas 4: O2, 200, STEC SEC-4400MC Gas 5: AR, 100, STEC SEC-4400MC Gas 6: N2, 100, STEC SEC-4400MC Chamber C: MXP+ Polymide ESC MKS640 IHC 1 Torr manometer Quick release lid Vitron slit valve o-ring High efficiency bias RF match OEM 12B RF gen bias No Autobias Monochrometer endpoint system ENDP30 endpoint software SEIKO SEIKI 301 turbo pump Magnet driver full installed Chamber pump not included Simply cathode type Butterfly throttle valve Vat gate valve Process kit not included Gas 1: CF4, 100, STEC SEC-4400MC Gas 2: CHF3, 300, STEC SEC-4400MC Gas 3: O2, 50, STEC SEC-4400MC Gas 4: O2, 200, STEC SEC-4400MC Gas 5: AR, 100, STEC SEC-4400MC Gas 6: N2, 100, STEC SEC-4400MC Gas delivery options: MFC maker: STEC Transducer displays: core tool MOTT filter Regulator: core tool Transducer: core tool Valve: core tool Gas connection: Sing line drop Gas line feed side: AC side Gas line feed direction: bottom Exhaust: Top Exhaust feed side: BD side Chiller: Heat exchanger for cathode: ETC Heat exchanger for wall: ETC (2) Total chiller W/ RS-485 interface Chiller valve connections: Manifold Generator rack valve connection: Manifold Valve connections: 1 each for wall and cathode per chamber (A, B, C) Chiller hose size: 3/8 Quick.