中古 AMAT / APPLIED MATERIALS Centura HDP #293724275 を販売中
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ID: 293724275
ウェーハサイズ: 8"
ヴィンテージ: 1999
CVD System
Wide body load lock
HP+ Robot
Standard system controller
(3) ETO Racks
SMIF Loader
Monitor rack
Large pallet tote: #1 / #2 Miscellaneous part
Top gas duct
SMIF Loader
Cathode rebuild stand
Video monitor rack
(2) CRT Monitors
(2) Monitor bases
Light pen
0200-40126 Blade
(12) Lift pins
0190-35652 Seriplex PCB
Light tower
(3) Fiber optic cables
(3) Chambers
Chamber A, B, D: HDPCVD
Chamber E: M/S COOL
Chamber F: Orinter
A, B, D/ETO GEN Rack
Orienter / Degas
A,B,D Turbo / turbo controller
Cool down chamber
SMIF, MF, SMC
Light tower power
Power cable short
(2) Gas detector cables
(5) Micro save controllers
Manual included
Gas panel
Chamber A:
MFC / Size
1/O2 / 400
2/AR / 300
3/SIH4 / 200
4/H2 / 1000
5/AR / 50
6/SIH4 / 20
7/H2 / 100
8/NF3 / 2SL
9/AR / 2SL
10/O2 / 50
Chamber B:
MFC / Size
11/O2 / 400
12/AR / 300
13/SIH4 / 200
14/H2 / 1000
15/AR / 50
16/SIH4 / 20
17/H2 / 100
18/NF3 / 2SL
19/AR / 2SL
20/O2$ / 50
Chamber D:
MFC / Size
31/O2 / 400
32/AR / 300
33/SIH4 / 200
34/H2 / 1000
35/AR / 50
36/SIH4 / 20
37/H2 / 100
38/NF3 / 2SL
39/AR / 2SL
40/O2 / 50
Qty / Part number
(3) / 0150-10501
(1) / 0190-18120
(2) / 0190-18121
(1) / 0190-18122
- / 0190-18333
- / 13811-100
- / 0150-35277
(1) / 0150-18035
- / 0150-09106
- / 0140-18135
(2) / 0150-20112
(1) / 0140-18078
- / 0140-18082
(1) / 0150-10505
(1) / 0150-18048
(1) / 0150-3588A
(1) / 0150-10496
(1) / 0150-10495
(1) / 0150-10P492
(1) / 0150-10497
(1) / 0150-76180
(1) / 0150-18050
(1) / 0150-18040
(1) / 0150-20100
(1) / 0150-76646
(1) / 0150-18047
(3) / 0150-18030
(2) / 0150-76176
Missing parts:
Load lock cylinder
SMC Thermo-chiller
Vertical pump
ETO Component
Mag head
Throttle valve
1999 vintage.
まだレビューはありません