中古 AMAT / APPLIED MATERIALS Centura DPS II AE Poly G3 #9195071 を販売中

Poly etcher, 12" (3) Process chambers Factory interface configuration Front end PC type: 4.0 FEPC FIC PC Type: CPCI (3) Load ports A3 Type: Atmospheric robot KAWASAKI single fixed robot Side storage: Right and left Mainframe configuration IPUP Type: ALCATEL A100L Gas panel type: Standard VHP Robot: Dual blade MF PC Type: CL7 Chamber configuration: Chamber A: Chamber model: DPS II Poly Bias gen: AE APEX 1513, 13.56 MHz Bias match: AE 13.56 MHz, 3 kv navigation Source gen: AE APEX 3013, 13.56 MHz Source match: AE 13.56 MHz, 6 kv navigation Turbo pump: STP-A2503PV Throttle valve: VAT Pendulum valve DN-320 FRC: MKS FRCA-52163310 ESC: Dual zone ceramic ESC End point type: EyeD IEP Chamber B / C: Chamber model: DPS II Poly Bias gen: AE APEX 1513, 13.56 MHz Bias match: AE 13.56 MHz, 3 kv navigation Source gen: AE APEX 3013, 13.56 MHz Source match: AE 13.56 MHz, 6 kv navigation Turbo pump: STP-A3003CV Throttle valve: VAT Pendulum valve DN-320 FRC: MKS FRCA-52163310 ESC: Dual zone ceramic ESC End point type: EyeD IEP Missing parts: AXIOM Chamber RF Source VODM Throttle valve 2007 vintage.