中古 VEECO FPP 5000 #128113 を販売中

Four point system Compact integral probe and display Microprocessor based electronics Automatic ranging Four selectable displays Sheet Resistivity V/I Bulk resistivity of a slice with a known thickness Thickness in, A, MILS, or microns of a slice or layer with a known bulk resistivity Keyboard Programming of slice or layer thickness or bulk resistivity Automatically performs a reverse and forward measurement each time the cover is closed RETEST button allows additional measurements without disturbing the probes Automatically holds the last reading after the probe is released and until the next measurement is made Error code displays indicate improper operation, readings and electronics Extended measurement range displays sheet resistivity up to 450k ohm/sq and down to a resolution of .001 milliohm/SQ High accuracy of 0.5% of reading on all reading between 5 milliohm to 5 k ohm. No more than +/- 8.0% at the extreme limits of the range Self test circuitry built in to determine if a fault is present Self calibration and zero circuitry assures high accuracy in all but extreme ranges Index substrate holder allows repeatable probe positioning on the substrate Probe up permits repeatable measurements independent of operator force and substrate thickness Integral RFI and light shielding for high resistivity measurements Plug in probe head adaptors make probe head changing convenient and non critical Typing mode determines N and P typing for most semiconductor substrates or layers Penetration permits high energy pulse to be applied for the purpose of breaking through thin oxide layers Penetrate function can be disabled by means of internal switches Automatic calculation of correction factors to compensate for probe tip spacing variations Back lit front panel indicates only the units applicable for the mode of operation chosen Electrical Specifications: The FPP-5000 requires an input power of 115/230 VAC +/- 10%, 50/60 Hz, at approximately 30 watts Geometric Correction Range: Based on the 2 configuration technique. Displays if calculated geometric correction is between 4.18 and 4.82 Calculated values above and below results in a flashing display in display SHEET, SLICE, and THICK If as a result of the calculation, the intermediate results are negative, the display will indicate E 07. Optional RS-232C Interface: Output on 25 pin female subminiature "D" connector Selectable Baud Rate: 9600, 4800, 2400, 1200, 300, 150 Optional Hand Held Probe Head: For testing wafers over 6" in Diameter. Comes with six foot cable. Specify probe head when ordering.