中古 SEMICS Opus III SH #293773919 を販売中
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ID: 293773919
Prober, 6"-12"
Temperature range: Ambient to 150°C
Chuck Force: 300kg
Index time: 200 m sec
Smart Probe card Alignment (SPA) mechanism
Intelligent overdrive control
Fast linear motor control for XY stage
Z-down control during power-down
CCD Camera for wafer alignment
Cassette mapping for thin wafers
Probing area:
X-axis: ±175 mm
Y-axis: ±185 mm
Accuracy:
Positioning accuracy (X/Y): ±1.0 µm
Z-axis accuracy: ±1.0 µm
2020 vintage.
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