中古 ADVANCED INSTRUMENT TECHNOLOGY / AIT CMT-SR2000N #9218034 を販売中

Automatic system, 8" XYZ-Axis fully automatic system High precision JANDEL P-point probe head Auto / Manual range selection Built-in temperature sensor Remote control by operating PC Data analysis (2D, 3D map) ASTM & SEMI Quick measurement mode Includes: JANDEL 4-Point probe head unit Z-Axis robot arm Revolution sample stage chuck (XY-Axis) Membrane keyboard panel LCD Display window Remote control communication port Vacuum hose connector (200 mm Hg) Accessories Operating PC Power cable & USB Cable for remote control AIT Reference, 3" Specifications: Sheet resistance measurement: Measuring method: Contacted by 4-Point probe Measuring range: 1 mohm / sq ∼ 2 Mohm / sq Resistivity measurement: Measuring method: Contacted by 4-Point probe (Input thickness) Measuring range: 10.0 μohm·cm ∼ 200.0 kohm·cm Measurement accuracy: ± 0.5 % (Precision resistor) JANDEL 4-Point probe Pin spacing: 25 mils ∼ 50 mils by 5 mil increments Pin load: 10 gram / pin ∼ 250 gram / pin Pin radius: 12.5 micron∼500 micron (polished 2μ diamond) Tolerance: ± 0.01 mm Needles: Solid tungsten carbide φ0.40 mm Measurement condition: Wafer type, measure point interval Save & load: Data, wafer type, measure point Data analysis: 2D, 3D Mapping, data map On / Off: Remote, vacuum Data export: Excel format & printout Measurement mode: Auto measurement: Point interval designation by user Quick measurement: ASTM & SEMI Mode Point measurement: Appointment on wafer by mouse Manual measurement: Appointment on wafer by arrow key Measuring time: Approximately 2 ± 1 sec / point Operating personal computer: IBM PC / AT compatible USB Communication Stage chuck vacuum requirements: Vacuum: 200 mm Hg Vacuum hose: Urethane 4 mm Operating & service manual Power: Line voltage: AC 220 V ± 10% Electric power: 40 W, 500 mA Line frequency: 50/60 Hz Current source: 10 nA to 100 mA DVM 0V to 2,000 mV.