ID: 293761366
ウェーハサイズ: 8"
ヴィンテージ: 1996
Developer system, 8"
(2) Spin units
(6) Hot plates
(2) Cool plates
Loader type: Index
Process type: L-Type
(2) Develop spin unit (Spin chuck: 80Φ)
Develop unit: Stream nozzle, Top rinse, Back rinse
1996 vintage.
