中古 TEL / TOKYO ELECTRON ACT 8 #9312079 を販売中

(4) Coater / (4) Developer system, 8" (2) Chemical boxes (2) SMC Thermo controllers TEAM KOREA Temperature and humidity controller AC Power box Left to right Wafer and carrier type: Notch (25) Slots (4) Uni-cassette loaders Carrier station: Type: Normal uni-cassette (4) Cassette stages Pick-up cassette Uni-cassette system Coater unit (2-1, 2-2, 2-3, 2-4 Module): (3) Dispense nozzles with temperature controlled line RDS Pump Rinse nozzle: Back / EBR / Solvent bath Rinse system: 3 Liters (2) buffer tank systems PR Suck-back valve type: AMC Suck-back valve Programmable side rinse Direct drain Developer unit (3-1, 3-2, 3-3, 3-4 Module): Nozzle for each unit 2-Stream nozzles for DI rinse 2-Points for back side rinse on each unit Developer system: 3 Liters (2) buffer tank systems Developer temperature control system Direct drain (2) Adhesion units: Sealing closed chamber with built-in hot plate HMDS Tank with float sensor Interface type: NIKON High temperature hot plate (16) Low temp hot plates (9) Chill Plates (CPL) (4) Chilling Hot Plate (CHP) process station (3) Transition Stage (TRS) modules Transition Chill Plate (TCP) module Wafer Edge Exposure (WEE) module (2) Temperature control units Missing parts: Main controller (4) Coater cups (2-1, 2-2, 2-3, 2-4) (3) Developer cups (3-1, 3-2, 3-3) Main display panel CRA X-Axis motor CSB Add on board (9) Coater PR pumps (2-1.2-2.2-3) IRA Y-Axis motor driver IRA Tweezers LHP Module cover Power: AC 208 V, 3 Phase 2007 vintage.