中古 TEL / TOKYO ELECTRON ACT 8-D #293816882 を販売中
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ID: 293816882
Coater / Developer system
Dual Block (DB) system
Wafer Edge Exposure (WEE) module
(2) Bottom Anti-Reflective Coating (BARC) modules
(2) Coater (COT) modules
(4) Developer (DEV) modules
(5) Precision Hot Plate (PHP) modules
(9) Low Temperature Hot Plate (LHP) modules
(4) High Speed Hot plate (HHP) modules
(2) Adhesion (ADH) modules.
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