中古 EVATEC Solaris S151 #293752399 を販売中

EVATEC Solaris S151
製造業者
EVATEC
モデル
Solaris S151
ID: 293752399
ヴィンテージ: 2007
Multi-chamber sputtering system (6) Cathode chambers: (2) Sources with diameter of 30 cm each Heating source (3) Multi-sources Substrate sizes and throughput (for typical configurations): Processable substrates with ∅ 200 mm or 156 mm × 156 mm edge length Maximum thickness: 2 mm Capacity: Max. 1200 substrates per hour Cycle time < 3 seconds. Media supply: Gases: Argon, Oxygen, forming gas (Ar:H2 = 95:5), Nitrogen Compressed air Cooling water Exhaust air 2007 vintage.
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