中古 EVATEC Solaris S151 #293752399 を販売中
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ID: 293752399
ヴィンテージ: 2007
Multi-chamber sputtering system
(6) Cathode chambers:
(2) Sources with diameter of 30 cm each
Heating source
(3) Multi-sources
Substrate sizes and throughput (for typical configurations):
Processable substrates with ∅ 200 mm or 156 mm × 156 mm edge length
Maximum thickness: 2 mm
Capacity: Max. 1200 substrates per hour
Cycle time < 3 seconds.
Media supply:
Gases: Argon, Oxygen, forming gas (Ar:H2 = 95:5), Nitrogen
Compressed air
Cooling water
Exhaust air
2007 vintage.
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