ID: 293802491
ウェーハサイズ: 6"
ヴィンテージ: 2022
Wafer inspection system, 6"
Simultaneous surface
Photoluminescence
Darkfield inspection system
OCR Integration
Defect trace function
Vacuum: 80 K Pa, Φ10 mm
SECS / GEM Interface
Power supply: AC 200-240 V, 3 Phase, 50/60 Hz
2022 vintage.
