中古 KLA / TENCOR Surfscan SP2 #9228176 を販売中

Particle measurement system, 12" P/N: 0074965-000 Sensitivity modes includes: Standard throughput inspection mode High throughput inspection mode High sensitivity inspection mode Advanced illumination optics supports following mode: Normal illumination Oblique illumination Enables qualification of current and next-generation substrates: SOI Strained SOI Strained SI Optimized sensitivity Throughput: - < 37nm defect sensitivity on polished bare silicon Qualification and monitoring of process tools: 90, 65, & 45 nm technology nodes Components included: UV Laser Defect map and histogram with zoom Micro view measurement capability Surf image Real-time defect classification (RTDC) Operating system: Microsoft Windows XP Book on board Operations manuals Puck handling: 300/200mm Equipped with powder coat painted panels Phoenix dual FIMS vacuum wafer handler, 12" (pp) Secondary UI for bulkhead installation Configured for MCCB (us/eu) power inlet Configured for IC/OEM mfg surf quality recipe Optical filter Enhanced XY coordinates: Standard classification LPD-N classification LPD-ES classification Grading and sorting 20 Degree 40 Degree Rough films Enabled: Haze Haze normalization Haze analysis Haze line classification IDM SP2 Edge exclusion: 2mm 4 Color light tower (RYGB) Gem/secs and HSMS E39 Object services: E40 Process job management E94 Control job management E90 Substrate tracking E87 Carrier management services (based on e39) Control jobs (E94 Based on E39) Substrate tracking (E90 Based on E39) (2) Advantage radio frequency (RF) carrier ID readers: Identifies name of carrier (FOUP) Intended for use with phoenix handler and isoport loadports Reader required for each FOUP loadport 2006 vintage.