中古 CARL ZEISS AIMS Fab #293779314 を販売中
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ID: 293779314
Mask qualification system
MCU 28 Z-Controller
KL 2500 LCD Cold light source
Controller for lamp
PC Controller
System modules:
DUV Camera
Imaging unit
Granite bridge
High precision scanning stage, 9"
Anti-vibration system
Electronic rack
Control panel
Illumination unit
Flat panel display
Keyboard
Control panel for X-Y-Z Stage:
Motorized XY Scanning stage
Z-Motorized focusing drive
Bertrand lens
CCD Camera
Tube lens
Reflected light illumination port
Reflector turret
Nosepiece
Objective lens
Condenser lens
Wavelength filter
UV Illumination port
Power supply.
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