中古 SVG / PERKIN ELMER / ASML Micralign 700 #9238309 を販売中

Projection mask alignment system, 5" PERKIN ELMER 651 / 551 HT Auto Fine Alignment (AFA) Pre-alignment system Depth of focus: ± 6 Microns for 1.5 Micron wide lines and spaces (UV-4) Distortion plus magnification tolerance: ± 0.25 Micron Manual alignment: ± 0.25 Micron, 98% of data population Automatic alignment and magnification compensation: ± 0.25 Micron range, 98% of data population Uniformity of illumination: ± 3.0 % or <2 % for 2" and 4" Throughput rate: ≥ 100 Wafers per hour (UV-40, OEM Spec.) Resolution: At 320nm - 440nm (UV- 4) 1.25 Micron wide lines and spaces At 300nm - 350nm (UV- 3) 1.00 Micron wide lines and spaces At 420nm - 280nm (UV- 2) 0.90 Micron wide lines and spaces Overlay machine to machine: ± 0.30 Micron, 98% of data population With automatic alignment and magnification compensation operating Spectral range: 240 nm Through visible with standard secondary Mini-mag system Pick and place autoload (PAL) High reliable mod 600 pre-aligner assy PCE Mask carrier PCE Cassette for test mask HT Condenser Manual included Automatic fine alignment kit.