中古 KARL SUSS / MICROTEC MA 8 / BA 8 Gen3 #293750114 を販売中

Mask aligner Manual and Motorized alignment stage: Automatic wedge compensation system Alignment gap programmable: 1 to 1000 micron Resolution: 1 micron Mask aligner mode: X ±5.0mm, Y ±5.0mm, Theta ±5° Bond aligner mode: X ±3.0mm, Y ±3.0mm, Theta ±3° Joystick X/Y and THETA TSA Microscope Motorized X/Y Manipulator and Rotation for microscope Microscope tilt for exposure Moveable exposure unit Loading and unloading wafer Single substrates Substrate stack PLC Control with LCD display Windows GUI Lithography application: 2" x 2" up to 8" x 8" Aluminium profile Pneumatic damper CD Operator manual BSA Microscopes distance: 33mm Rack tooling storage Top Side Alignment (TSA) BSA and IR Microscope Mask holder Exposure chuck Transport fixture Bond align chuck Bond adapter frame Alignment stage: X, Y, THETA Alignment stage motorized operation, resolution 0.1 µm WEC Head BSA Microscope M608 Visual Screen split field microscope Binocular head vireo 5-30° (10) Eyepieces Turret Single objective: UMPL FL 5x/0.15 UMPL FL 10x70.30 LMPL FL 20x/0.40 LH1000 Exposure unit Lamp adapter: 1000 W CIC 1200 / LH 1000 Lamp power supply USHIO HG Lamp: 1000 W (2) Channel light-sensor: 365/405 nm CPL UV Optometer case UV Light measuring probe: 365/405 nm for UV Optometer Position dial light sensor Extended video alignment UV400 High resolution optics 2012 vintage.