中古 ESI 6100 #293751158 を販売中
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ID: 293751158
ヴィンテージ: 2000
Laser trimming system
High level compiler
Laser:
Diode pumped: Oil cooled
Wavelength: 1047 nm
Pump source: >10,000
Optics:
Small spot package: 4 µm to 7 µm 1/e² @ 1047 nm
Medium spot package: 6 µm to 9 µm 1/e² @ 1047 nm
Large spot package: 9 µm to 15 µm 1/e² @ 1047 nm
Spot size range: 4 µm to 15 µ 1/e²
Energy density control:
Automatic focus: Direct laser focus
Laser power control: 1% to 100%
Laser beam positioning:
Accuracy: ±1 µm
Speed range: 1.0 µm/s to 10,000 µm/s
Resolution: 0.1 µm
Size: 19 mm
Handler / Prober:
Stepping field: 152.4 mm
Resolution: 1 µm
Accuracy: 12.7 µm
Stage travel: 2.25 mm
Stage resolution: 1 µm
Theta range: ±4°
Theta resolution: 0.0002°
2000 vintage.
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