中古 VARIAN E220 #9230245 を販売中

Medium current ion implanter, 6" Signal tower Production wafer: (2) Wafers (P.P+ type) Platen type: M-clamp Loadlock: Left & right (P.P+ type) CVCF Option: Interlock System vacuum: Ion source chamber: 1.1E-6T Beamline chamber: 8.5E-7T, 4.2E-7 End station chamber: 1.8E-7 Pumps: Terminal: Dry pump Turbo pump Controller E/S Chamber: Dry pump Dry pump / Booster pump Cryo pump L/L Cryo Make / Model / Description EBARA / 40x20 / Terminal dry LEYBOLD / Mag W 1300 / Source TMP LEYBOLD / Mag Drive / Source TMPC PFEIFFER / - / Resol. TMP PFEIFFER / - / Resol. TMPC PFEIFFER / TMH 520 IS / Beamline TMP PFEIFFER / - / Beamline TMPC CTI / Cryotorr / End station C/P GEN 1 CRYOPUMP 4F / - / Left loadlock GEN 1 CRYOPUMP 4F / - / Right loadlock EBARA / 40x20 / End station dry CTI / 9600 / Cryo compressor Process gas: High pressure: AsH3 PH3 Ar(N2) BF3: SDS X2 High voltage range: Extraction power supply: 0 keV~40 keV Acceleration power supply: 0 keV~180 keV Power supplies (Assembly): Arc: 300VDC, 15A Filament: 7.5VDC, 200A Source magnet: 20V, 50A Extraction: 40kV (Max:75kV), 50mA Extraction suppression: -2kV, 50mA Analyzer magnet: 40V, 125A (Max:150A) Mirror power supply: 30kV, 2.5mA Quadrupole magnet #1: 20V, 50A Quadrupole magnet #2: 20V, 50A Scan generator: -30kV, 10mA Crucible (Vaporizer) power supply: 60kV, 1.2mA Dipole lens magnet: 40V, 125A (Max:150A) Acceleration: 180kV, 5mA (-> 8mA) Acceleration suppression: -5kV, 5mA Controller (Assembly): Left arm servo Right arm servo Vacuum gauge Scan faraday Platen tilt servo Vertical lift orienter Uniformity Liner motor servo amp Orienter Left elevator Right elevator Dose integrator DI Temp monitor Options: Gas box type: 2-High pressure bottle, 2-SDS Insert Source type: Bernas no vaporizer Utilities: Power: 208 VAC, 3-Phase, 5-wires, 45 kVA, 120 FLA Air: 100~150 PSI N2: 40~150 PSI Cooling water: 60~150 PSI, temp: 4~21°C 1994 vintage.