ID: 293700420
ヴィンテージ: 2007
Sputtering system
LN2 cold trap
Turbo pumped included
RF and DC power supplies
Rotating substrate stage
No heated substrates
Compressed air: 60 PSI
(3) Sputter sources, 3"-5"
Power supplies: 208 VAC / 60 Amps, 50/60 Hz, 1 Phase
2007 vintage.
