中古 YES / GLEN G 1000 #293730451 を販売中

Plasma cleaner EDWARDS iXH100 Vacuum pump (8) Standard shelves (3) Standard gases (3) Mass Flow Controllers, up to 3 for gas mixing Gases: O2, N2 Operation temperature: 20 - 100°C N2 Flow rate: 1.7 SCFM Process gas flow rate: 20-50 SCCM average Interior chamber dimensions: 45.72 cm (W) x 45.72 cm (D) x 30.48 cm (H) Chamber process area: 18" x 18" x 12" Chamber material: 59.69 cm (W) x 71.12 cm (D) x 113.284 cm (H) (23.5" x 28" x 44.6") Process gas inputs: 6061-T6 aluminium SEMI™ Compliance: S2/S8 Number of recipes: 12 with load/save/loop/link capability Range of exposure time: 0-1200 seconds (20 minutes) Resolution of timer setting: 1 Second Performance: RF Plasma power: 0-1000 watts @ 550 VAC, selectable power RF Leakage magnetic: 0.6 mA/m, 4.15 x 10-7 A2/m² Average RF Leakage electrical: 1.6 V/m, 4.2 V2/m² Average Nitrogen consumption: 0 SCF idle, 6.8 SCF peak, 1.7 SCF average Power consumption with Pump: 375W idle, 1000W peak, 640W average Reactant gas consumption: 0 SCF idle, 20-50 SCCM Heat emission: 920 watts average Power requirements: 200-250 V, 20 Amps, 50/60 Hz, 1 Phase.