中古 TEL / TOKYO ELECTRON Telius TSP-3055SSS #293815262 を販売中
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ID: 293815262
Dry etcher
Loader module:
(3) Load port units
(2) Process sections:
(2) Process Modules (PM)
(2) Load Lock Modules (LLM)
(2) Gas Boxes (GB)
(3) Water leak detectors
AC power rack:
(4) RF generators
AC power box
(2) TMP controllers
(2) I/O boxes
Water leak detector
(4) Chillers
(2) PM dry pumps
(2) LLM dry pumps.
まだレビューはありません