中古 SINGULUS / STANGL Singular XP ISE #293752400 を販売中
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ID: 293752400
ヴィンテージ: 2015
ICP-PECVD System
Type: Customized
Designed for coating of crystalline silicon solar cells
IR heater station
(2) ICP-PECVD stations for coating sunny side down with integrated NF3 chamber cleaning by plasma etching process (Silane chambers)
(2) ICP-PECVD stations for coating sunny side down with mechanical chamber clean (Metal alkyl chambers)
Components:
(2) EDWARDS iXH1820 Pumps with power supply, Profibus module D397-52-880
EDWARDS iXL120 Turbomolecular pump
(8) EDWARDS STP-iX3006C Turbomolecular pumps
(4) EDWARDS STP-1003C Turbomolecular pumps
SIEMENS PLC
FESTO Pneumatics
HAMLET Valves
BROOKS MFC
(20) MITSUBISHI MR-J3 Servo amplifiers
(4) ADVANCED ENERGY, Type Apex® 5708009 HF Generators
Sensors
LENZE Actuators
2015 vintage.
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