ID: 293724144
ウェーハサイズ: 6"
Reactive Ion Etcher (RIE), 6"
CI2 (10 SCCM)
HBr (20 SCCM)
O2 (20 SCCM)
CF4 (44 SCCM)
Min pressure: 10 mTorr
Quartz (Recipe): 10 SCCM CF4, 300W, 30 mTorr
Chromium:
Cl2: 9.7 SCCM
O2: 2.25 SCCM
RF Power supply: 75W, 80 mTorr
Etch rate: 75 nm/min.
