中古 MATTSON Aspen III #9190468 を販売中

Light etcher, 12" No multiple level security No pressure pascal unit No TM pump share Maximum forward RF power (Set point and read back) head A to F: 3000 Maximum reflected RF power (Read back) head A to F: 3000 RF Generator type chamber 1, 2 and 3: AE RFG-3 No wafer ON paddle sensors UNIVERSAL Remote pump No LP access mode indicator No CHI VAT valve CHI Gas box CH2 and CH2 Gas box: UNIVERSAL No CH1 VAT valve CH2 and CH3 VAT Valve (2) Loadport load LED indexes (5) Loadport unload LED indexes Loadport manual mode LED index (9) Loadport handoff button indexes (8) Loadport Err LED indexes No CH1 manometer analog cable CH2 and CH3 Manometer analog cable No CH1, CH2 and CH3 fast preheat Fast preheat maximum VAT valve angle: 100 No CH1, CH2 and CH3 back robot Z-motion enabled No CH1 source cooling Communications port: 36 (2 NT) Light curtain type: System RF Strike option: Fix strike RF Strike timeout: 5S Hd-Hd Plasma strike timeout: 3S No check wafer slide sensor Chiller Routing type: Standard Lite etch settings No independent lift pin monitoring Tag reader type: Hermos 1 (2) CH1, CH2 and CH3 N2 Gas lines Start verity interface: Manual MFC Check: Standard (2) Gas purge lines No 3-stages pump down for load-lock No E84 AMHS stop bit No request host time set No LL wafer cooler Chiller signal display: Chiller No LL pump purge No LL cross flow No UPC No wafer shift sensor Run time (Min): 384,009 Wafer count: 463,919 Total run time: 3,242,784 Total wafers: 6,534,874 MFC Type: Unit 1661 Disks: MC and GUI Gases: O2, N2, CF4, H2/N2: 4% 2008 vintage.