中古 MARCH FLEXTRAK-2MB #9185980 を販売中

Plasma cleaners Multiple inline plasma modules Uniform plasma treatment Dual lane boat handling Ideal for pre-flip-chip underfill (3) Axes symmetrical plasma chamber (2) Boats/plasma cycles Chamber maximum volume: 5.5 liters (338 in³) Plasma processes: Pre-flip chip underfill Pre-die attach Pre-wire bond Pre-mold steps Plasma contamination removal & cleaning: Fluorine & other halogens Metals & metal oxides Organic compounds Electrodes: Variable electrode configurations: Power-ground Ground-power Power-power Working area: 305W x 305D mm (12W x 12D in.) RF Power: Standard wattage: 600 W Frequency: 13.56 MHz Gas control: Flow volumes: 10, 25, 50, 100, 250 or 500 sccm (4) MFCs Control & interface: Software control: EPC with PC-Based touch screen interface Remote interface: SMEMA, SECS/GEM Vacuum pump: Standard dry pump: 16 cfm Optional wet pump: 19.5 cfm Optional purged dry pump: 16 cfm N2 Purged pump flow: (2) slm Process gas fitting size & type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Process gas purity: Lab or electronic grade Process gas pressure: 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max Purge gas fitting size & type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Purge gas purity: Lab or electronic grade N2/CDA Purge gas pressure: 2 bar (30 psig) min to 6.9 bar (100 psig) max Pneumatic valves fitting size & type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Pneumatic gas purity: CDA Oil free Dewpoint: ≤7°C (45°F) Particulate size: <5μm Pneumatic gas pressure: 3.45 bar (50 psig) min to 6.89 bar (100 psig) max Exhaust: 25.4 mm (1 in.) OD Pipe flange SEMI: E10, S2/S8 (EH&S/Ergonomics) Gas generators: Nitrogen, hydrogen (requires additional non-optional hardware) Chiller Scrubber Power supply: 220 VAC, 15A, 50/60 Hz, 1-Phase, 12 AWG, 3-Wire CE Marked 2014 vintage.