中古 LAM RESEARCH TCP 9600 SE #293757625 を販売中

Etcher, 8" APM Bias Operator interface: Bulk head Indexer: Hine 38A 715-331131-002 Fixed gao middle chamber 716-330122-003 Plate top ceramic 853-032190-008 TCP Matcher 853-330951-021 Bias matcher Wafer clamping : ESC (Notch) RF Generator Chamber manometer: 3Torr ALCATEL ATH-1300M Turbo pump Pressure controller Main: Vat valve, 64 PM and PM5 MDVX-018 & AC-2 DSQ DSQ Hinged DSQ Matcher Heated paddle WVDS Manual fill Chamber heater controller: 12 Loop external anafaze Orbitally welded gas box: (8) Gases Closed loop He Cooling: UPC8130 and Tylan CDL-12S13 (20 Torr) Remote power module: Main 175A Remote Power module C/B Hardware Load station: Belt type shuttle Standard edge Detector Load lifter.