中古 LAM RESEARCH / ONTRAK TCP 9400 SE #9134000 を販売中

Etcher, 8" SMIF General Configuration: TCP 9400 Stand alone Bulkhead Hepa present: Yes Indexer type: Standard, hine 38A Control system classic or envision: Classic Remote AC box: Yes Chiller: RISSHI EX-1000 (l) SMIF: LPT2200 (2) TCP Generator: 660-024637-006, AE RFDS Bias generator: 660-024637-003, AE RFG1250 Microwave: No DSQ: No Hinged DSQ: No DSQ / MW Generator: No Generators: No Top match: Yes Bottom match: Yes Variable gap: No Fixed gap: Yes ESC: Yes Clamped system: No Backside He UPC: UNIT 50sccm UPC-1300 Backside He manometer: 853-017643-003,Tylan Upgraded variable gap: No VAT64: Yes; VAT valve system VAT65: No Turbo type: SEIKO SEIKI STP-H1000L Endpoint detector type: 853-001983-005; 405/520um Heated endpoint windows: Yes Anafaze type: Yes Gas box unit or orbital: Vertial MFC #1: CI2-200 sccm; Area FC-780C MFC #2: CF4-200 sccm; Area FC-770AC MFC #3: 02-10 sccm: Area FC-780C MFC #4: He-200 sccm: Area FC-770AC MFC #5: HBr-200 sccm: Area FC-780C MFC #6: SF6-200 sccm: Area FC-770AC MFC #7: 02-200 sccm: Area FC-770AC MFC #8: S02-100 sccm: Area FC-780C MFC #10: No MFC #11: No MFC #12: No WVDS: No Autofill WVDS: No Backside He regulator: No Chamber manometer: Millipore CMH4-MllS19E; 0.1torr Trubo manameter: 853-031540-001: MKS 625A11TDE; 10torr Pumping line manameter: MKS 625AllTDE;10torr Heartbeat PCB: 810-017012-002 Turbo / Controller: Yes Turbo heaters: Yes Bulkhead or ballroom components: Yes Covers: Yes Indexers: Yes ELL: Yes Chamber: Yes VAT Assy and controller: Yes XLL: Yes Gas box: Yes AC / DC box: Yes Control enclosure: Yes Upper match enclosure: Yes Lower match enclosure: Yes Calibration tool: Yes Chamber parts: Yes (1) set User manual: Yes Pressure control: Yes Cables arid harnessing: Chiller signal interface cable: Yes Chiller EMO cable: Yes Chiller power cable: Yes Generator signal interface cable: Yes Generator EMO cable: Yes Generator power cable: Yes Remote AC box EMO cable: Yes Etcher power cable: Yes 1996 vintage.