中古 LAM RESEARCH 9400 #9006154 を販売中

Spare parts: Qty - Part No. Description 10 - 716-038612-002 DC PLUG (9100) 89 - 742-008991-001 GASKET EMI(RECT CROSS SECTION)(1PC=1FT) 1 - 853-330281-001 ASSY RF SENSE BOX UPPER MATCH 2 - 799-432042-204 END EFFECTOR 3 - 799-432042-204 END EFFECTOR 2 - 685-094897-001 20MTORR MANOMETER 3 - 685-094898-001 500MTORR MANOMETER 1 - 660-094652-003 ESC POWER SUPPEY 10 - 796-007305-002 SCREW EIFT PIN 39 - 728-094726-012 SCREW ESC EACLOSURE 3 - 685-095610-001 10TORR MANOMETER 2 - 605-092466-002 OPTIC FIBER 1 - 797-900918-001 HELIUM UPC 50SCCM MFC 2 - 754-092082-002 BALL BEARING VAT 1 - 796-098651-001 HIGH PERFORMANCE VAUUM GREASE10MG 1 - 660-093818-002 BIAS GEN 4.0 MAHZ 2-5KW 1 - 810-441976-002 ASSY PCB 1 - 866-360231-012 PENDULUM VALVE 3 - 605-094988-001 ASSY PCB LASER 1 - 853-492319-001 TM VME 1 - 715-330825-006 LNR,CHMBR,AL,EXTND,ALLI 6 - 715-330180-010 ELCTD,BOT,FXD GAP ESC,LOW TEMP 5 - 734-000663-001 O-RING 1-3/4 ID X 1/8 V 6 - 715-012244-001 SHIELD BELLOWS INNER GATE 6 - 734-009013-001 O-RING 3/4 ID X 1/16 C/S VITO 6 - 734-005633-001 O-RING 1 7/8 X 3/32 51 - 742-007760-001 GASKET,RF (WIRE OVER ELAST)(1PC=1FT) 34 - 734-007461-001 O-RING 5.25 X 5 7/16 X 3/32 6 - 839-330423-001 WLDMT,NUPRO,MANO,ISO 1 - 715-330092-002 COV NUT BOT GAS FEED 6 - 796-095768-001 SHLD,SPLINTER,1K TURBO PMP 5 - 842-093390-040 KIT,REBUILD,LP VLVL 6 - 839-012255-001 BELLOWS INNER GATE 5 - 739-090783-001 CONTACT STRIP COPPER 3 - 734-061280-237 O-RING,VIT 2-237 5 - 796-091775-001 MILLIPORE, WAFERGUARD 2 4 - 734-092561-212 O-RING .139 DIA C/S FSI 35 - 796-000233-002 SEAL CENT. RING ASSY NW40 13 - 796-000233-005 SEAL, NW 16, CENTERING RING 5 - 734-061280-175 O-RING,VIT,SER2 5 - 734-092561-241 O-RING .139 DIA C/S FSI 10 - 734-092561-260 O-RING .139 DIA C/S FSI 25 - 734-008793-002 O-RING PERFLUORO (GAUGE WALL) 1 - 666-440485-00 PROBE TC J TYPE 2.38 ESC 2 - N-5100-024 BELLOW O-RING 8 - 720-000960-014 SCREW, SHC, UNC-21 1/4-20SST 16 - 720-000942-010 SCREW FLT HD SST 8-32X 5/ 2 - 714-011010-001 SCREEN WINDOW 8 - 720-000960-008 SCREW SOC HD SST1/4 20 X 1/ 4 - 734-001849-200 EPD POINT O-RING (8.75IDX1/8C/S) 2 - 734-007460-200 VIEW PORT O-RING (7.00IDX2/32C/S) 1 - VT-P205315 S65 DN200 LOCKING SEAL 1 - VT-N5111-374 SO2 46*236 ACTUATOR SEAL 2 - 684-093409-001 CABLE FIBER 1 - 685-094250-001 LASER MODULE IMW 1 - 660-098076-002 ESC DC POWER SUPPLY 12 - 853-331019-001 ASSY,R WDO,QIK CLN,E9400/E9600 12 - 853-331021-001 ASSY,L WDO,QIK CLN,E9400/E9600 20 - 718-098592-001 LOCKING R, HARD ANODIZED 20 - 718-098591-001 PENDULUM PL,HARD ANODIZED 12 - 853-331025-001 ASSY,Q/C,TOP COV,E9400/E9600 4 - 9100 FTS CHILLER 1 - 853-034112-006 ASSY,CA,J-TAPE T/C#8 RING LUG 1 - 660-097567-001 UPS,420VA,120VAC,50/60HZ 3 - 678-460687-001 HEATER CAST WATROD SPECIAL 1 - 853-491746-100 ASSY,DC PWR SUP,PM,TCP OXD 15 - D002010069 VITON O-RING 2-120 2 - 799-550716-001 Fxtr threta home Mag7 Robot 2 - 713-240548-001 ELCTD PTCTR ESC 1 - 518-410240-001 Fixture ALIGN END EFFECTOR 2 - 799-550689-001 Fixture MTGMAG7 ARM 1 - 799-550690-001 CA RS232 MAG7 1 - 515-032639-001 Tool cylinder height Adjust 5 - 515-031765-001 Tool align 4 pin LFTR Bellows 3 - 515-432084-001 ALIGNMTOOL VCE4 ALLI 1 - 002-2082-01 Tool LIPSEAL REMOVAL 1 - 001-5998-01 ASSY Fixture E/R Band TE 6 - 678-097859-003 HTR,V,FAST ACTING,ANGLE,PM 5 - 678-098055-002 HTR,V,ISLN,ANGLE,LOPRO 1 - 716-011624-001 RING INSULATOR LOWER ELECTROD 4 - 853-031556-019 ASSY HEATER CARTRIDGE 75 WATT 1 - 853-031556-019 ASSY HEATER CARTRIDGE 75 WATT 6 - 714-4324-13 BELT TIMING 116 VROOVES 1 - 799-550693R001 RFRB ASSY PCB MCC2A VCE6 1 - 714-015698-001 PNL,FOUP BLANK-OFF,ATM 1 - 853-550012-001 ASSY, DUAL, ARMS, STD 1 - 810-017021-001 ASSY PCB LIFTER FILTER 1 - 644-096863-002 Relay ,SS,Dual ,25A 1 - 715-390129-001 PL,MTG,PENDULUM V 2 - 715-014556-013 GASKET DRILLED VCR .013DIA 1 - 715-390128-001 PL,MTG,ADPTR,PENDULUM V 1 - 839-360109-001 WLDMT,LINE,He,EVAC CHMBR(SE) 1 - 839-360162-001 WLDMT,LINE,He,EVAC AOV9 1 - 734-005637-001 O-RING 6.984 X.139 1 - 715-032012-004 PLATE WINDOW CHAMBER CAPTIVE HDW 1 - 797-900918-003 UPC,UNIT,8130,HOV,ENH FC 1 - 853-330632-016 ASSY HTR CRTG 55W 16"LG 2 - 853-330632-026 ASSY HTR CRTG 55W 26"LG 1 - 853-330632-039 ASSY HTR CRTG 55W 39"LG 1 - 799-550530-001 ASSY WFR ROTB MDL 1 - 739-550096-001 SEAL SFT ROB 1 - 955-028895-003 TBG POLYURETHANE IB 85DUR 3/4 1 - 839-100488-001 WLDMT,VLV, FLTR,VCE VNT, R 4 - 734-550499-001 O-RING,CASS CHMBR 1 - 810-017082-004 ASSY PCB 16 CHAN HTR CNTRL 1 - 853-370702-002 ASSY,HTR CRTG,55W 4 - 716-099277-001 INSUL PL CHAMBER TO VLV 3 - 739-007783-001 O-RING 12.475 ID X .275 CS 1 - 715-011617-002 RING RETAINING 1 - 715-550264-001 FXTR AGV ARM SETUP VCE-4 2 - 713-020033-001 FXTR LEVEING SINGLE AXIS AC 1 - 715-550122-001 TOOL INSNG WRIST BAND 2 - 524-004640-001 FXTR ROBOT HOME POS VTM SCARA 7 - 853-015982-001 ASSY MANUAL CONTROL BOX AUTOTU 1 - 685-491921-001 RMT CONT UNIT 4 - 853-015030-001 ASSY MANUAL CONTROL BOX AUTOTU 5 - 734-061280-279 O-RING VITON 12.984ID 5 - 734-061978-203 O-RING CHEMRAZ SERIES2,-203 5 - 842-092162-001 KIT REBUILD EDWARDS.