中古 LAM RESEARCH 490 / 590 #9077769 を販売中

Etcher Main Chamber: Chamber Bottom chamber and exhaust ring Lower electrode assembly with focus ring style electrode (Boxed separately) Vacuums Rotary O-rings Seals Pneumatic tubing and fittings Pneumatic cylinders Upper electrode is process dependent and not supplied Load Locks: Vacuums Rotary O-rings Seals Pneumatic tubing and fittings Pneumatic cylinders Wafer arms and wafer guides are size dependent and not supplied Machine Mainframe: Pneumatic tubing Connectors and fittings Cables re-bundled and ty-wrapped Frame Top panels Front and side panels Elevators: (Packed separately) Top plastic dust covers not supplied Baratron head not supplied Gap Drive head and Automatch: (Packed separately) Front display panel and operator interface Electronics drawer (Packed separately) Factory manuals are included Complete frame RF Power supply is not supplied nor are any external cables, gas lines, throttle valve, or vacuum fittings.