中古 DENTON VACUUM Z-Flex #293818726 を販売中
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ID: 293818726
ウェーハサイズ: 8"
Ion Beam Deposition (IBD) system, 8"
(2) Sets of chamber liners
Single carrier load lock
INFICON IC6 Quartz crystal rate controller, dual sensor head
(2) Turbo pumps
(2) Dry scroll pumps
Water pump
Water cooled stage, 15-35 RPM
Configured for 10" diameter carriers/6” Circular Wafer
Target turret, 4 Targets, 10" diameter
Deposition ion source:
ICP RF Source: 14 cm
Etch ion source:
ICP RF Source: 14 cm.
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