中古 AMAT / APPLIED MATERIALS Centris SYM3 #293627020 を販売中

Metal etcher, 12" (4) Load ports Chambers: Chamber A1: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Chamber A2: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Chamber B1: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Chamber B2: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Chamber C1: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Chamber C2: CNTSYM3; Chamber chemicals gases used: O2, Cl2, HBr, SiCl5, SF6, BCl3, CH2F2, SO2, NF3, CHF3, CF4, He, Ar, N2 Gas lines: Line1, 2, 4, 12, 13: MFC Line3: Cl2, 400 SCCM Line4: MFC Line5: HBr, 400 SCCM Line6: SiCl4, 120 SCCM Line7: SF6, 100 SCCM Line8: O2, 60 SCCM Line9: BCl3, 300 SCCM Line10: CH2F2, 40 SCCM Line11: SO2, 200 SCCM Line14: NF3, 500 SCCM Line15: CHF3, 300 SCCM Line16: CF4, 300 SCCM Line17: He, 500 SCCM Line18: O2, 700 SCCM Line19: Ar, 1000 SCCM Line20: N2, 50 SCCM Does not include: Chiller Dry pump Power supply: 208 V AC, 3 Phase 2019 vintage.