中古 ALCATEL / ADIXEN / PFEIFFER 601E I-Speeder #165552 を販売中

Silicon etcher, 6" Wafer size: 6", converted from 4" Semco ESC Genmark 4 robot with wafer aligner 4” single wafer vacuum loadlock assembly Chuck table with controlled-temperature from –30°C~ +60°C Substrate holder: 4” wafer electrostatic clamping system with center kit Low-pressure plasma source with laser view port adaptor on top of the source System control and monitoring with PLC & PC, Windows NT & Alcatel GUI UPS power for PLC control Operates the machine in manual, semi-automatic, or fully-automatic modes Chamber primary pump: ADP122 Cold trap with heated pump line Maglev turbomolecular pump: ATH 1300M DN 200 heated throttle & isolation valve VAT series 64 + By-pass + line with controller Loadlock dry pump ACP28 Loadlock molecular pump MDP 5011 Lauda Chiller RK8CP Power transformer: input AC200-220V, output AC400V Baratron 100Pa Source power supply: 2kW RF with RF20S generator controller Bias power supply: 500W with RF5S generator controller Robot loading version User’s manual on CD ROM and PC HD Electrical schematics on cleanroom paper Telediagnostic (modem+software) Process Module: Room (Bosch) temperature process. (including Bosch patent) Substrate holder electrostatic clamping system Wafer centering kit 100mm Source: 2kW RF Bias: 0.5kW RF Heated process chamber walls Laser view port adapter on top of the source Reactor Pumping: Alcatel ADP 122 Maglev turbomolecular pump ATH 1300M DN200 heated throttle & isolation valve VAT series 64 + by-pass Completed pumping line is heated, while a coldtrap is installed before the dry pump Gas lines: 4 UNIT mfc’s, type 1 gas lines, installed in the main frame of the A601E SF6-500 sccm, C4F8 – 200400 sccm, O2 –20 sccm, O2-200 sccm oad/Unload Module: Robot loading Optical fiber for wafer localization Ferrofluidics feedthrough on transfer arm Molecular drag pump MDP 5011 Mechanical pump needed Control Module: PLC & PC Windows NT & Alcatel GUI Telediagnostic(modem & software) Substrate holder: Electrostatic clamping system version Additional spare electrostatic ceramic (4”): yes, but used Pumping station: ADP122 and ACP28 dry pumps pack for process chamber and loadlock Gas lines: Gas cabinet for 6 gas lines Different UNIT MFC’s flow range/standard Transfer module and loadlock GENMARK cassette loading robot Flat finder/aligner Documentation: Hard copy of the user manual Documentation set on cleanroom paper CD-ROM with User manual Normal Paper: manuals of all sub-units Cleanroom Paper: Electrical diagrams Additional Parts: Cryo kit for Bosch and Cryo process Electrostatic Chuck 6” wafer size kit for manual or robot loading version Tool has been mainly used for R&D purposes Modifications: RK8CP chiller Upgrade of Maglev ATH 1300 to ATH 1600 turbomolecular pump Upgrade of ACP20 to ACP28 dry pump 51 foot pump cable Light tower Upgrade of 2 kW RFPP generator to ENI 3 kW RF generator UNIT MFC: SF6 / 1000 sccm UFC 180 SECS II protocol Software upgrade (PC and pLC) 2001 vintage.