中古 TEL / TOKYO ELECTRON Alpha 8SD #293723242 を販売中

Furnace, 8" Process: Pyro Wafer type: Si SEMI STD-Notch Boat operation: Boat type OF-0520009-1 Heater (HT Temp) MMI and gas flowchart: Gas box and front operation panel installed Pressure display unit: MPa / Torr Carrier type: FOUP / 25 slots SEMI STD Wafer notch aligner Wafer transfer type: YASKAWA 1+4 Edge grip Load port: Board, jumper, cable, STS air tube, sensor Main HTR: Electric resistance and braking check Exhaust box: Integrated Front upper cover Rear upper cover Wafer transfer Carrier transfer Boat elevator Mechanical driver IGS HDD Gas flow chart O2 Analyzer Does not include HCT Power box: Parts, fuse check, board Cable: FNC-Power box FNC-RCU FNC-Pump unit Gas distribution system: IGS type: Integrated gas system Gas: N2, HCI, H2, O2 Gas leak detector Pump Vacuum gauge: Press monitor (133 KPa) Power distribution system: Voltage 3 Phase: 400 VAC 3 Phase connection type: Star connection Voltage single-phase: 100 VAC Single-phase connection type: Grounded Frequency: 50/60 Hz 1996 vintage.