中古 TEL / TOKYO ELECTRON Alpha 8S #9078699 を販売中

Furnace, 8" Process: Poly Safety specification: TEL Standard System power rating: AC200V, 3P / AC100V, 1P Loading configuration: (4) Loaders / (127) Wafer Slots Process pressure (Torr): Low pressure Process temperature: 600º C FTP Heater: Installed Rapid cooling unit: Installed Heater type: VOS-40-017 Process gases: Process gas MFC 1,2,3,4: N2 Process gas MFC 5, 6: SiH4 Process gas MFC 7, 8, 9: PH3 Gas system: Filter: MOTT Pou-20S-SV2, Ni Air valve: FUJIKIN Diaphragm type Mega-mini and block MFC: STEC SEC-74 series Check valve: FUJIKIN O-ring seal type Hand valve: FUJIKIN: Diaphragm type Regulator: VERIFLO SQ series Pressure transducer: NAGANO ZT 17 Others: Joint: Gasket type: Pure nickel type Piping material: SUS316L Up tube Piping working method: Welding Welding methods: Automatic welding Gas exhaust system: Dry pump: EBARA A150W-T Main valve: MKS 172-1080P Vacuum gauge: MKS Baratron sensor normal Joint: Gasket JIS Method Piping material: SUS316BA, Stainless steel APC: MKS 253B-3-80-2, Butterfly valve VG1: 0 to 10 Torr, Normal type VG2: 0 to 1000 Torr, Normal type VG3: ULVAC GP-2A, Pirani gauge P.SW: Pueron, over pressure detect Manifold: Structure: Sealing method: End point sealing Material: SUS316L Stainless steel Port: Gas port: 3/8" Ultra torr Inner T/C port: 20DAI Ultra torr Exhaust port: 3: DIA Cooling method: Water cooling Safety interlock : Gas flow low MFC: Too low gas flow Alarm: > 5% Abort: ± 10% Gas flow high MFC: Too high gas flow Alarm: > 5%, Abort: ± 10% Low PCW flow: No PCW supply Alarm: > 3 min Abort: > 5 min Heater break down: > 7 min PCW Leak detection: Alarm Process heater over temperature: Chamber over heat Heater break down: > 3 sec Furnace area over temperature: Alarm Heater break down: > 3 sec SCR Area over temperature: Alarm Heater break down: > 3 sec Interruption of electric power: Alarm Abort: < 3 sec Heater break down: > 3 sec Gas flow sequence: Alarm,abort Pump off: Alarm, abort Pump trouble: Alarm Pressure low (reactor tube pressure): Alarm, abort Pressure high (reactor tube pressure): Alarm, abort . Leak check (reactor tube pressure): Main valve off delay: 10 min Abort: > 20mTorr 1997 vintage.