中古 TEL / TOKYO ELECTRON Alpha 303i-K #9373155 を販売中

Vertical LPCVD furnace, 12" Process: TEOS (100) Process wafers I/O Port / SMIF: FOUP No load lock 25-Carrier slots Boat type: Single Main controller (WAVES) Operation screen: Touch screen Gas flow chart: Front and rear M560 Temperature controller Vacuum pressure control: CKD VEC Controller transformer: 208 V, Single phase Heater transformer: 208 V, 3 Phase Gases: Gas 1: N2 Gas 2: N2 Gas 3: O2 Gas 4: TEOS Gas 5: N2 Gas distribution: Basic style: Conventional Tubing material: SUS-316L Tubing finish: VCR Manual valve: CKD Air operated valve: CKD MFC: HORIBA STEC Exhaust distribution: Air operated valve type: IGS Connect Main valve: CKD VEC Cold trap No pump line Wafer / Cassette handling: (16) Cassette storage Cassette In/Out port Cassette handling robot Wafer transfer type: 1 + 4 Fork material: AL2O3 Fork variable pitch Fork wafer presence sensor Elevator handling: Boat elevator Auto shutter Boat rotation Mechanical parts Heating chamber: Heater type: VMM-56-002, 100 wfs (5) T/C Type (5) Spike T/C Furnace cabinets includes clean air flow system Scavenger and water cooling unit Power supply unit (U/P Box): Control unit Transformers SCR Breaker unit FOUP and wafer handling automation: (2) FOUP Load ports FOUP Transfer Stocker: (18) FOUPs FIMS Port KHI Wafer load automation Variable pitch change mechanism with (5) forks Auto tube shutter Boat elevator with boat rotation mechanism Integrated gas system in gas cabinet and TEOS LSC baking system: O2 Gas line TEOS Gas line Purge N2 Vacuum vent Exhaust vent Piping tape heater Main valve type: CKD Hot, P/N: VEC-VH8G-X0101 Vacuum gage Pressure switch Piping: 100 A VAC Does not include: Outer/Inner T/C N2 Load lock N2 Boat cooling shower Dual boat operation B.S Sensor: 0-10 Torr, 0-1000 Torr Cable length: 12 m (Power box) AC Power box: 208Ｖ,3 Phase, 4 Wires 2006 vintage.