中古 MRL MDL 1148 #9170550 を販売中
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ID: 9170550
Diffusion furnace
Welded frame construction with antique white painted frame and panels
Front access through swing out bi-fold doors
Element on center lines, 19"
Service access: Tilt down front instrument panels
Internal round electro polished scavenger with individual tube level exhaust
Stainless steel tube: Diameter, 3"
R Spike for temperature control
Redundant excess temperature interlock
Air to water heat exchanger
Fan cooling module on top
Auxiliary power requirements: 120 V Step-down transformer
Furnace control power back-up: UPS
(6) Leveling feet
Heating elements (Tube 2, 3 and 4):
(3) Zones element
Linear thermal flat zone, 48"
Element uniformity:
+/- 1.0°C Below 600°C across linear flat zone
+/- 0.5°C Above 600°C across linear flat zone
Insulation / Energy kits are included per tube level
Load and source end blocks
Soft tube collars
Soft heat disks
Load station:
Welded frame construction with antique white painted frame and access panels
Mirror polished finish on work surface
Pullout drawers in load station base
Horizontal laminar flow with fire retardant, Class I HEPA filters
Variable speed blowers to supply air flow to HEPA filters
Front access laminar flow pre-filters
Channels on back wall allow universal mounting of cantilevers
(6) Leveling feet
Auxiliary power requirements: 110 V Outlets
Gas Plumbing Module (GPM):
Welded frame construction with antique white painted frame and access panels
(4) Stainless steel tube level shelves
Side and front access through clear vented lexan doors
(4) Leveling feet
Gas trays are mounted vertically, facing front
Main breaker and tube breaker with lock out tag out capability located in base
Element MRL MaGnA Maximum operating temperature: 1100°C
Process tube: Quartz process tube
Carriers: Quartz
Baffles: Non-product boats on load
Source end of product wafers
Load baffles: Quartz 3 plate paddle shank
Profile TC: Type R
3-Junction
Source entry
SiC Paddle: 2" Square shank, slotted
Gas tray:
(4) AERA Analog mass flow controllers (MFCs)
Nitrogen (N2), High flow
Nitrogen (N2), Low flow for carrier gas (POCL3)
Oxygen (O2), High flow
Oxygen (O2), Low flow
N2 Loop with fixed orifice
Normally open valve is provided during power fail
Pressure switch with gauge on carrier N2 per bubbler system
Bubbler assembly for POCl3 (Tube level 2, 3 and 4):
JC SCHUMACHER ATCS-15 Source temperature controller
Gas tray to bubbler to process tube: Teflon connections / Valves
Chemical ans flask
MRL Z3 Cantilever belt drive (X 3, tube 2, 3 and 4):
Box beam backbone for overall drive support
Precision linear rail providing smooth ride
(2) Profile linear bearings
Front and rear sprocket with non-particulate ladder chain
360:1 Gear reducing DC motor: 24 V
Local and remote modes of operation:
System DDC
Cantilever control box
Power supply
Digital drive controller
With Load / Unload / Stop / Local
Remote switches
Thumb wheel speed buttons
Load and unload approach photo sensors
With pre-dwell
Post-dwell prior to door closure
Boat out complete
Backside mounting
Diagnostic LED’s within power
Interconnecting cable
(3) MRL Z2 atmospheric head assemblies (Tube 2, 3 and 4)
SAINT GOBAIN Square shank SiC paddle compatible, 2"
(2) Self aligning top and bottom head assemblies
(3) Clamping assembly to secure door assemblies
Adjustable pivot pin
Paddle containment tube with torque sensitive paddle lock
Quartz door closure
SST Scavenger closure plate
Dual quartz rods with teflon retainers housed in a SST clamping tube assembly
5 Axis of adjustment
Designed for tool less head and door removal
(3) MRL Tube level controllers (Tube 2, 3 and 4)
(15) Valves on / Off
(8) MFC's to one of 4 values
(3) Zones of heat to 1 of 8 temperature
Temperature control mode: Spike or profile
(7) Front panel outputs (Lights / Horn)
Programmable step exits from one or more of following
On time (Hours: minutes: seconds)
On (12) Programmable digital inputs
On analog input (Temperature or gas) programmed value
On leak check
On profile completed
On complete boat-in or boat-out (for auto load only)
(3) Independent temperature control loops:
Direct digital temperature control
(8) Set points per loop
Programmable alert / Alarm deviation limits
Spike control mode with programmable PID coefficients
Profile control mode
(15) Valve outputs:
Designed to drive pneumatic solenoid directly (5 watt)
24 VDC Supplied with system
(8) Analog (MFC) loops:
Designed for direct interface to standard MFC's
(4) Set points per loop
Programmable alert / Alarm deviation limits
Step redirect:
(8) Redirect destinations
Programmed based on various combinations:
Digital inputs
Temperature alarms
Gas alarms
Human machine interface
HMI Color touch screen per tube level
Spare parts included:
Fuse set
Indicator light and lens set
SCR Firing card
Temperature controller 1/32 din
(2) Dual junction spikes t/c type R
Tri junction type R profiles t/c
Load end vestibule block
Source end vestibule block
Load end soft collar
Source end soft disk
Quartz process tube
(4) Quartz boats
Quartz door closure
(2) Quartz nails
(2) Quartz nail sleeves
Quartz door seal
(2) Soft O’Rings for quartz door seal.
MRL MDL 1148は、効率的で正確な材料拡散用に設計された拡散炉およびアクセサリーパッケージです。炉は様々な金属の焼きなまし、合金化、およびコーティングのために適しています。専用パッケージは、温度制御と精度を考慮して設計された電源を備えたグラファイトヒートゾーンシステムで構成されています。炉の寸法は幅91cm、奥行き55cm、高さ137cmになります。直径78cm、奥行き89cmの作業室を有し、最大重量150kgの荷物を受け入れることができます。制御された温度範囲は周囲温度と2000°Cの間にあり、高い精度と均一性で維持されます。暖房は8つの外的な地帯の炉を通して、それぞれ独自の独立した縦の持ち上がるドアと行われます。独立して調整可能なゾーン温度は、400 AMPのサイリスタ電源によって給電され、4つのチャンネルプロセスコントローラを介してセットポイントと補正でデジタル制御されます。炉は熱損失を防ぎ、外面をきれい保つのを助ける二重壁のガラス繊維の絶縁材のパッケージが装備されています。また、エネルギー効率に優れた冷却ジャケットを備えたグラファイト発熱体の2メートルの長いセクションもあり、効率的な動作を保証し、絶縁材の劣化を防ぎます。パッケージには、温度調整装置、グラファイトスプリットブロック、メンテナンスツール、ワイヤーセットなどの付属品も含まれています。スプリットブロックとワイヤーセットは、拡散炉を1つの場所から別の場所に簡単に、効率的で安全な輸送を可能にし、ほこりや汚れからの保護を提供します。必要に応じて、冷却ファン、緊急電気切断、ガス流量安全インターロック、緊急冷却システムなどの追加のアクセサリーを利用できます。全体として、MDL 1148拡散炉パッケージは非常に耐久性と信頼性が高く、材料拡散のための包括的かつ手頃な価格のソリューションを提供します。信頼できる設計、正確な温度調整および付属品の広い範囲はそれをさまざまな金属のアニーリング、合金化およびコーティングのための優秀な選択にします。
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