中古 CENTROTHERM E 240 / Euro 2000 #104065 を販売中

Horizontal diffusion furnace, 4" Specifications: Wafer size: 4" Can be converted to 6" with cantelever loading system, software adjustable Power: 384kW ID tubes: 155 to 160 mm C, D, E, R stacks (16 FUR.) Temperature range: 400°C to 1200°C CENTROTHERM controller Gas cabinet with MFCs, exhaust facility Soft-landing system for loading and unloading wafer under laminar Process configuration: (4) stacks x (4) tubes E stack: E1: sinter/anneal Gases: H2 / N2 MFC capacity: 10slm N2, 2slm H2 E2: sinter/anneal Gases: H2 / N2 MFC capacity: 10slm N2, 2slm H2 E3: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 55slm O2, 10slm H2, 500sccm N2 (source) E4: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 10slm O2, 10slm H2, 999sccm N2 (source) F stack: F1: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source) F2: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 5slm O2, 10slm H2, 500sccm N2 (source) F3: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source) F4: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source) C stack: C1: N-type doping using POCl3 Gases: N2 / O2 / POCl3 (source N2) MFC capacity: 10slm N2, 1000sccm O2, 999sccm N2 (source) C2: N-type doping using POCl3 Gases: N2 / O2 / POCl3 (source N2) MFC capacity: 10slm N2, 500sccm O2, 999sccm N2 (source) C3: N-type doping using POCl3 Gases: N2 / O2 / POCl3 (source N2) MFC capacity: 10slm N2, 999sccm O2, 999sccm N2 (source) C4: Al alloy Gases: O2 / N2 MFC capacity: 999slm N2, 5slm O2, 2slm H2, 500sccm N2 (source) D stack: D1: Pyro oxidation with TCA Gases: H2 / N2 / O2 / TCA (source N2) MFC capacity: 10slm N2, 5slm O2, 10slm H2, 999sccm N2 (source) D2: Doping with spin-on dopant / anneal / sinter Gases: N2 / O2 MFC capacity: 10slm N2, 999sccm O2 D3: Doping with spin-on dopant / anneal / sinter Gases: N2 / O2 MFC capacity: 10slm N2, 1slm O2 D4: Doping with spin-on dopant / anneal / sinter Gases: N2 / O2 MFC capacity: 10slm N2, 1000sccm O2 Old furnace: #22: Thick Al alloy Gases: O2 / N2 Rotameter capacity: 150CD N2, 150CD O2 #23: N-type doping using POCL3 Gases: O2 / N2 / N2(S) Rotameter capacity: 150CD N2, 150CD O2, 150CD N2 (source) #24: Gold drive Gases: O2 / N2 Rotameter capacity: 150CD N2, 150CD O2 Spares inventory: Furnace: STC / TCU interconnecting cable (Qty 5) THERMOWELL oil units (Qty 2) CU406 SCPB 40 DGT display boards (Qty 2) Magnetic coupling EXT grade wire: OMEGA RS-20-100 Thermocouple extension wire, 250' (Qty 67) Thermocouple connectors: Omega GMP-R/S M (Qty 80) Thermocouple connectors: Omega GMP-R/S F (Qty 17) Grounded mini connectors: RS M (Qty 29) Grounded mini connectors: RS F (Qty 3) Custom heavy gauge diffusion cartridges: AD-1419 Cartridge 2-pole gold plated contact: SW142G-10-B 2-pole gold plated contact: SW142G-10-M Set switch gold plated contact: OSWG3-10 TOL-O-MATIC cable cylinder (Aluminum tube): CC 10 SK 70 (Qty 3) Thermocouple panel meters, 230V: Omega DP 41 - TC 230 Thermocouple and fine wire welder: TL-WELD 230VAC (Qty 4) Reference junction thermostats, VT60: 1018 Paddle belt, 12m MFCs: (Qty 4) MFC: COASTAL H2: 10 SLM UFC-1100A MFC: COASTAL O2: 500 SCCM UFC-1100A MFC: COASTAL O2: 1 SLM UFC-1100A (Qty 2) MFC: COASTAL O2: 5 SLM UFC-1100A (Qty 2) MFC: COASTAL N2: 10 SLM UFC-1100N (Qty 2) MFC: COASTAL N2: 999 SCCM UFC-1100A MFC: COASTAL SiH4: 500 SCCM FC-260 MFC: COASTAL NH3: 3 SLM FC-260 (Qty 3) MFC: MYKROLIS O2: 500 SCCM FC-2900V MFC: MYKROLIS O2: 1000 SCCM FC-2900V MFC: MYKROLIS N2: 1000 SCCM FC-2900V (Qty 2) MFC: MYKROLIS H2: 10 SLM FC-2900V (Qty 2) Cards Lag 03: p/n 001112 Display card: p/n 001022 Card: p/n 001824 Locals: Teflon coated wire, 2-core: 20m (Qty 3) FESTO cylinders: p/n DGS-25-50-PPV-A (Qty 3) FESTO cylinders: 10 bar (Qty 15) FESTO sensors (Qty 4) Solenoids (Qty 6) Batteries, 3.3V (Qty 400) Miscellaneous ICS: EEPROMS, Digital ICS, reg and microprocessor Quartzware: (Qty 7) Tubes, 2,150 mm (161 mm dia) TESLA: DQ4-39 (Qty 6) Tubes, 2,150 mm (155 mm dia) TESLA: DQ4-09 THERMCO tube, 1,840 mm: DQ4-15 (Qty 10) TESLA cross slotted boats: DQ4-20 THERMCO cross slotted boat: DQ4: 01 (Qty 6) Hydrox quartz balloons: DQ4-05 Thermocouple sheath, outer: DQ4-11 (Qty 2) White elephants: DQ4-17 (Qty 3) Inverted boats: 92 slots: DQ4-34B (Qty 31) Inverted boats: 84 slots: DQ4-34A (Qty 2) Boat holders: DQ4-18 (Qty 12) Injectors: DQ4-04 (Qty 2) Adaptors: DQ4-08 (Qty 3) Baffles: DQ4-12 (Qty 4) Paddles: DQ4-03 (Qty 3) End caps: DQ4-16 (Qty 10) Discs: DQ4-37 (Qty 3) Push rods: DQ4-09 (Qty 2) Plugs: DQ4-26 (Qty 5) Thermocouple sheaths, inner: DQ4-41 (Qty 3) Quartz ladders: DQ4-32 Thermocouple, p/n 101 4T-720-R-020 Facility requirements: Electrical: 440VAC, 3-phase, 50/60Hz, 24kW maximum for single furnace Cold water: 60 PSI, 15°C to 20°C Air: 40 PSI O2, H2, N2: 40 PSI Exhaust 1988 vintage.