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2146 results for found: 中古 Evaporators

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  • AIO: SLIM 50

    AIO: SLIM 50 Evaporator, with NetTRACK INBOARD-5 real-time computer control with True 1 button Operation Data logging Recipe management SECS-GEM Server compliant Process Chamber: 32" x 32" System footprint: 70" W x 43" D x 80.5" H Process Stations: 400°C, 4-8-16 KW Cryo pump / regeneration function ELO 15" Touchmonitor Multitasking Windows XP Platform Water supply: 3 - 5 GPM Air supply: 85 - 125 psig 208 VAC, 3P, 5 wire, 175 Amps.
  • AIO: SLIM 50

    AIO SLIM 50 Evaporator, with NetTRACK INBOARD-5 real-time computer control with True 1 button Operation Data logging Recipe management SECS-GEM Server compliant Process Chamber: 32" x 32" System footprint: 70" W x 43" D x 80.5" H Process Stations: 400°C, 4-8-16 KW Cryo pump / regeneration function ELO 15" Touchmonitor Multitasking Windows XP Platform Water supply: 3 - 5 GPM Air supply: 85 - 125 psig 208 VAC, 3P, 5 wire, 175 Amps.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL: FC 1800 Load-locked e-beam evaporator Substrate heaters Cryo pumped high vacuum system with roughing pump 4-pocket gun with TEMESCAL Simba power supply INFICON IC4 deposition monitor Bell jar: 19.5" ID 17" single substrate dome with rotation control Auto valve sequencer.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Load-locked e-beam evaporator Substrate heaters Cryo pumped high vacuum system with roughing pump 4-pocket gun with TEMESCAL Simba power supply INFICON IC4 deposition monitor Bell jar: 19.5" ID 17" single substrate dome with rotation control Auto valve sequencer.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-beam evaporation system System fabrication: Cabinet, Steel Framework, System Mounted on castors Fully-enclosed system cabinet with full opening service door Deposition chamber: 20" diameter x 9" high stainless steel Designed for waist high substrate loading and unloading 18" diameter stainless steel evaporation source chamber with viewport Pumping system: Cryogenic pump CTI-8 cryo with SC helium compressor Roughing pump: 27 cfm roughing pump High vacuum valves: Poppet valve Roughing, Leak-check, Backing, and Vent Valves Chamber gauging: Versavac combination ionization and TC gauge Deposition: E-beam TELEMARK 271 - 4 pocket 30cc Electron Beam Gun 6 pocket crucible indexer. Hardwired safety interlocks CV-8, 8kW power supply with X-Y beam sweep controller Deposition source shutter: Electro-pneumatic source shutter: Deposition controller:M MAXTEK 360 quartz crystal deposition controller Single quartz crystal sensor (water-cooled) Substrate heat: 2 kW quartz lamp substrate heating Substrate fixturing: Planetary or Lift-off tooling available Substrate rotation assembly with variable speed drive motor Vacuum controller: Temescal Auto/Manual vacuum sequence controller. OEM manuals Can be demonstrated.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-beam evaporation system System fabrication: Cabinet, Steel Framework, System Mounted on castors Fully-enclosed system cabinet with full opening service door Deposition chamber: 20" diameter x 9" high stainless steel Designed for waist high substrate loading and unloading 18" diameter stainless steel evaporation source chamber with viewport Pumping system: Cryogenic pump CTI-8 cryo with SC helium compressor Roughing pump: 27 cfm roughing pump High vacuum valves: Poppet valve Roughing, Leak-check, Backing, and Vent Valves Chamber gauging: Versavac combination ionization and TC gauge Deposition: E-beam TELEMARK 271 - 4 pocket 30cc Electron Beam Gun 6 pocket crucible indexer. Hardwired safety interlocks CV-8, 8kW power supply with X-Y beam sweep controller Deposition source shutter: Electro-pneumatic source shutter: Deposition controller:M MAXTEK 360 quartz crystal deposition controller Single quartz crystal sensor (water-cooled) Substrate heat: 2 kW quartz lamp substrate heating Substrate fixturing: Planetary or Lift-off tooling available Substrate rotation assembly with variable speed drive motor Vacuum controller: Temescal Auto/Manual vacuum sequence controller. OEM manuals Can be demonstrated.
  • AIRCO TEMESCAL: VES 2550

    AIRCO TEMESCAL VES 2550 Evaporator Diffusion Pump Box GRANVILLE PHILIPS Tower Batch dome for rectangular plates PLC 25.5" D x 24" H Stainless steel deposition chamber Water cooled 25.5" D x 20" H Stainless steel evaporation source chamber With VV-400 View Vac view port Teflon film Includes: Computer Screen Manuals.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam system (4) Pocket egun CV8 Power supply.
  • AIRCO TEMESCAL: SC 1800

    AIRCO TEMESCAL SC 1800 Evaporator, 3" CTI 8 cryo pumps CTI 8200 compressors Roughing pumps not included Currently installed.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam evaporator CTI Cryopump and compressor.
  • AIRCO TEMESCAL: TRC-3460

    AIRCO TEMESCAL TRC-3460 Crucible pocket selector Power: 240 / 120 VAC Input 1/8 amp - 1/4 amp fuse.
  • AIRCO TEMESCAL: FC-1800

    AIRCO TEMESCAL FC-1800 E-beam evaporator, 6" and 12" (4) Pocket E-gun Air cooled compressor X/Y sweep controller Water-cooled bell jar INFICON XTC crystal deposition monitor Power rating: 230V, 3-phase, 20FLA Air cooled compressor Heater CTI-Cryogenics pumping system Planetary system Parts list: Control box: HEINEMANN ELECTRIC AM12MG6 Electrical: 250V, 15A, 60Hz Fuse protection: no Controller: GRANVILLE PHILLIPS 260 Electrical: 115V, 2A, 60Hz Fuse protection: 2A, 6A Controller: AIRCO TEMESCAL SCH-408-6414/C Electrical: 110V, 1A, 60Hz Fuse protection: 1A, 1.5A Controller: AIRCO TEMESCAL SCH-409-8412 Electrical: 110V Fuse protection: no Controller: AIRCO TEMESCAL SCH-408-0853A Electrical: 110V Fuse protection: no Controller: AIRCO TEMESCAL ISET-2009D Electrical: 110V, 3A, 60Hz Fuse protection: 3A Controller: YEAGLE TECHNOLOGY X-Y Sweep Electrical: 110V, 1A, 60Hz Fuse protection: 1A Power supply: SLOAN SIX/TEN Electrical: 230V, 3-phase, 15A Fuse protection: external (x5).
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 Evaporator with e-beam source Includes: CTI-8 on-board cryopump system Air-cooled compressor GRANVILLE-PHILLIPS 307 Vacuum Gauge Controller TEMESCAL FDC-8000 deposition controller Custom Automatic bell jar lift and cycle controller Simba II E-gun power supply and auto sweep controller EDWARDS E2M-40 oil mechanical pump TEMESCAL SFIH-270-2 single pocket e-beam source Counter-top control cabinet Remote mounting of cryo compressor, HV power supply and mech pump 20' cables TEMESCAL Auto Sequence valve controller: removed from rack Electronic control rack Missing parts: Relay (available at additional cost) Sequence controller Helium lines leaked when machine was being disconnected System is not installed and was decommissioned Q3 2003 Systems will require recharging of the Helium for the cryopumps Currently in storage.
  • AIRCO TEMESCAL: FC 1800

    AIRCO TEMESCAL FC 1800 E-beam deposition system Process: used mainly for dielectrics (TiOx and SiOx) Bell jar: 18", metal, rotation on top Planetary for 3" wafers Power supply: CV-8 STIH-270 4-pocket hearth Crystal controller.
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam evaporator
  • AIRCO TEMESCAL: FCE 2700

    AIRCO TEMESCAL FCE 2700 E-beam Evaporator 2 Source E-beam tool with separate process chamber and source chamber Pumping: (1) CTI  10 Cryopump (1) CTI 8 Cryopump (1) DQP 40 with Blower roughing pump (1) Osaka Turbo Pump Model # (1) Dry backing pump (1) Missner Trap  Telemark VTP (1 set of 4 extra refrigerant tanks) Extra Hardware: (2) TT15 Telemark power Supply (check model) (4) Electronic Beam Controllers (2) Telemark E-beam guns (1) Thermionics Hydra 2 source 30 cc (1) Thermionics Hydra 6 source 30 cc Multiple E-beam rebuild kits and chimmeneys (500, 1000 each) Electronics: (2) Inficon XTC/3 QCM with complete software control in tool (1) 10KV, 15KW simba 2 power supply (2) Supper Sweeper Beam Controllers (1) UPS Backup power Windows 7 Computer with latest Temescal Software (2) Computer Controller shutters (1) Semi-flow MFC Controler 4 channels with 2 MFC (1) UV Desorption lamps system with 2 lamps (2) Temescal 10KW HFSC-2 guns with 80CC pockets (1) Baseplated with Multipocket Ebeam, gun (not installed) Dome configurations substrate deposition.
  • AIRCO TEMESCAL: BJD-2000

    AIRCO TEMESCAL BJD-2000 E-Beam evaporation system, 2".
  • AIRCO TEMESCAL: BJD-1800

    AIRCO TEMESCAL BJD-1800 E-Beam evaporator Power supply: CV-8 Single gun (6) Telemark pocket Cryo-pumped Inficon IC/4 deposition controller Planetary Dome rotation Size of the e-beam pockets: 15cc Fabmate crucible liners Quartz crystal monitor Inches underneath planetary Material deposited primarily: Au, Ti, Al, Mo, Cr, Pd Materials evaporated: In2O3, V, Rh Roughing pump: Hydrocarbon based oil Lesker TKO 19 Part number: EVCFABEB-13.
  • AIRCO TEMESCAL: TRC-3460

    AIRCO TEMESCAL TRC-3460 Crucible pocket selector Power: 240 / 120 VAC Input 1/8 amp - 1/4 amp fuse.
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