中古 TEL / TOKYO ELECTRON Telius SP 305 SCCM 販売用

ID#: 9074890

モデル:

Telius SP 305 SCCM

カテゴリー:

ETCHERS / ASHERS

機器の詳細:

Dielectric etcher, 12"

Standard Specifications
Software Revision: Linux 5.75 Rev 001
Lot Stability Dummy SW: Software for running lot stability wafer
OEE WPH Software: Yes
GEM SEC Revision: TBD
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 5 carrier stage (Continuous flow operation) with Semi compliant MENV and
FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Interface A: Yes
Utility Box: Regulator: Air/AR2500(SMC), N2/SQ-420E(VERIFLO),
He/SQMICRO(VERIFLO)
Utility Box: Manual Valv: OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge: Bourdon Gauge
Loader Mod Corrosion Prevent: NO, without Corrosion Prevent
Load Lock Pressure Monitor: Pressure Switch: VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge: TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM: 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 5 (LM;1, each PS;1)
Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of
loader on maintenance side x1)
Data Back up: USB& MO
EMO: Front x3, Rear x6
Cable Length: One 15m and one 16m (Interconnection, RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No brass fittings

Supporting Remote Units
Chiller: UBRPD5A-2T 
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE 15/14M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H6(2MHZ/5KW)(PS3)
Pen Record Box: 2L80-00212-12
Loader Module: SELME2112ZS22-AD5
LOAD PORT: NO, Bolts-L type
DRIVE UNIT: SBX92102928
READER OPTICAL: ISS-1700-1TELCC
Carrier ID Reader: NO,V640series+V700-L22 (Omron)
APC: 12" (320MM)

Hardware Configuration
Proc Chbr 1,2,3,4: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii

ESC type: Ceramics ESCwith STD Vpp
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins
Polished focus ring: O
FC lower insulator: FC lower insulator w/quartz upper ring shield
Magnet Shield: O
Oring for Chbr Body-Depos: Armorcrystal, Chemraz SC657
CEL Body ASSY: Brine Control Mode
TMP: TMP-3403LMC-T4(VG300) (SHIMADZU)
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: ESR80WN, KEG approved
Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: Pendulum Motion Dia., 320mm(VAT), R.T.~90deg
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: N,41A13DGA2AA040 (MKS), no process impact
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas

Gas Box Configuration:
Gas line 1- N2 1000 sccm-AERA FCD985CT-BF
Gas line 2- C4F8 200 sccm-AERA FC-D985CT-BF
Gas line 3- Ar 2000 sccm-AERA FC-D985CT-BF
Gas line 4- O2 50 sccm-AERA FC-D985CT-BF
Gas line 5- CH2F2 30 sccm-AERA FC-D985CT-BF
Gas line 6- CHF3 200 sccm-AERA FC-D985CT-BF
Gas line 7- CF4 200 sccm-AERA FC-D985CT-BF
Gas line 8- C4F8 50 sccms-AERA FC-D985CT-BF
Gas line 9- C3F8 50 sccms-AERA FC-D985CT-BF
Gas line 10- C4F6 50 sccm-AERA FC-D985CT-BF
Gas line 11- O2 1000 sccm-AERA FC-D985CT-BF
Gas line 12- Ar 500 sccm-AERA FC-D985CT-BF
Purge: N2 (Process Grade N2)
Filter: CNF1004USG4 (Nihon Pall)
Regulator: SQMICRO (VERIFLO)
Filter (N2): CNF1004USG4 (Nihon Pall)
Valve: Primary side(Utility-MFC):Mega mini (FUJIKIN)
Valve: Secondary side(MFC-PC):Mega one (FUJIKIN)
Piping: Dual Piping (for Gas leak containment, Gas box to Final valve & Exhaust through
Gas box)
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok L-type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge (with inside finishing)
Pressure Gauge: Bourdon Gauge (with inside finishing) 0.4MPa
SP3 Gas Line Connection: No
GBROR: GBROR

Process Kit Configuration:
WINDOW, SHIELD DEPO (DRM2) QUARTZ (ES1D05-400022-14)
WINDOW DEPO SAF0.5(DRM2) SAPPHIRE (ES1D10-406499-11)
SHIELD, UPPER 300MM RING – Quartz (ES3D05-250025-11)
Insulator, ESC Enclosure (COC) – Quartz (ES3D05-300142-13)
Cover Ring, 360- L (M) – Quartz (ES3D05-300243-11)
RING, BTM SHIELD Y-AL, SE (ES3D10-100844-11)
PLATE,EXHAUST Y-AL, SE (ES3D10-100845-11)

SHUTTER, BTM TYPE Y-AL, SE (ES3D10-101152-13)
SHIELD,DEPO (ES3D10-101195-11)
Focus Rg, 360-302-COC (ES3D10-201448-13)
Insulator, lower T32-BI-NC (ES3D10-202405-13)
WINDOW,DEPO CLP/Y2O3-100P(N) (ES3D10-350344-12)
SCREW PIN LOCK, Cerazol: Ceramic (ES3D10-404011-11)
Si Upper Electrode (ES3D10-253020-11)
CEL ASSY (ES3D87-052656-11)
ESC ASSY (with ceramic pusher pins) (ES3D87-002056-13)
Damage/Missing Parts:
Non reported, please reconfirm at tool inspection

Currently installed.
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