中古 VARIOUS Lot #9137138 を販売中

Spare Parts: Qty Part Number Description 15 0010-00750 ETCH CHAMBER COVER(TOP COVER) 1 0010-01388 LTESG Control Box 2 0010-01591 BASIC INDEXER ASSY NON-ENP 9 0010-02029 ASSY, HTD ROUGH LINE DPS, SEIKO 1000 1 0010-02124 ASSY, 8’’ ENHANCED DEGAS LAMP 350C 3 0010-03171 Assy, susc, BB Teos, 200mm screwless 1 0010-03339 HEATER, 8"SR AMJ WXZ 2 0010-03347M Heater, assy 6'' SHT .025 WXZ 4 0010-03661 Assy, 150mm Susceptor universal chamber 1 0010-05257 DxZ Heater, High Temp 1 0010-09050 STORAGE ELEVATOR 100MM 4 0010-09053 ASSY, 200MM STORAGE 1 0010-09067 ASSY, WINDOW MECHANISM 2 0010-09128 ASSY THRU THE WALL SKINS 1 0010-09416 ETCH RF MATCH 6 0010-09616 Assy, 150mm Susceptor universal chamber 1 0010-09625 COVER ASSY MECHANISM GUARD POSN B 3 0010-09802 TEMP CONTROL ASSY PER CHAMBER 1 0010-09933 HV MODULE ASSY ESC 1 0010-09935 MONOCHRO MODUL ASSY ENDPOINT 1 0010-09967 ASSY 8-SLOT WAFER POSITION SENSOR MOUNT 1 0010-10121 WPS Laser 1 0010-10204 Pedestal esc 6'' à Refurbisher 2 0010-13873 ASSY PCIIE cathode 1 0010-13927 PEDESTAL LIFT ASSEMBLY PRECLEAN 2K 2 0010-14299 water box assy 200mm PCII E 1 0010-20130 Blade Assy 8 Inch Buffer 1 0010-20225 MAGNET "A" 13. 0" AL ASSY 1 0010-22176 AC/H2O Box assy 1 0010-30000 ASSY, FIBEROPTIC SENSOR CABLEGECO 1 0010-30425 Heater Assembly 8 0010-30425A Ceramic guide pin 1 0010-36160 ASSY, CERAMIC RING AND PLATE, LIFT TUBE 5 0010-38107 COVER, METAL, DXZ DCVD, ASSEMBLY 1 0010-55002 LID TEMP CONTROL TEOS 1 0010-70058 STOR ELEV ASSY, 29 POSN 2 0010-70149 ASSY ROBOT DRIVER UPPER/LOWER 1 0010-70162 ASSY,ACTUATOR SLIT VALVE 1 0010-70166 ASSY, 15 SLOT STORAGE ELEVATOR 1 0010-70323 ASSY, DOOR, SLIT VALVE, KALREZ O-RING 1 0010-70441 HEATER WATER BOX 2 0010-75091 ASSY, VGA MONITOR STAND ALONE 1 0010-75183 ASSY 2PHASE STEPPER MOTOR 1 0010-75246 CENTURA MSM, STANDARD 2 0010-75359 PVD Water Aose 2 0010-76001 ASSY STORAGE ELEV WAFER CASSETTE HNDLR 2 0010-76402 STORAGE 6' ' 8 SLOTS 1 0010-76858 DETECTOR ASSY RIGHT FAST WAFER MAPPING 1 0010-76859 DETECTOR ASSY LEFT FAST WAFER MAPPING 1 0015-09019 HINGE,MOD. FACILITIES PANEL 1 0015-09025 8 0015-09042 RESISTOR CERAMIC MOD 4 0015-09091 wASSY LAMP DRIVER,TESTED REP0190-09009 25 0015-09092 RF SHIELD 200MM 2 0015-09325 Adapter 1/4 VCR to 5/16-24 UNF 8 0015-09328 SCREW MCH BTN HD 4-40X 1/2 HEX SKT SST N 3 0015-77087 Ball Sleeve 1 002-1941-05 Alignment fixture 5 002-6347-01 Lift Pin Cool down MX400 2 0020-01275 SIDE PALLET 3 0020-03597 Spider Sputter etch 1 0020-04043 BOTTOM COVER SPUTTER ETCH 3 0020-04129 TOP HINGE BRACKET 2 0020-04145 ADPTR PLATE ROTOMETER 2 0020-04148 MANIFOLD CATHODE 1 0020-04149 BLANK-OFF PLATE ROTOMETER 5 0020-04181L INSULATING FLANGE ROUND 1 0020-04189 TOP ADAPTOR 1 0020-04194 LID SPUTTER ETCH 3 0020-04766 Insert, detector viewport 1 0020-05586 Ring Clamp 1 0020-06047 BEARING, THROTTLE VALVE 1 0020-06048 BUSHING, THROTTLE VALVE 1 0020-09002 WEDGE BLOCK SHAFT BELLOW 5 0020-09029 Covering Pipe 7 0020-09031 INSULATING WASHER 20 0020-09039 Strip 3 0020-09064 WINDOW FLANGE 2 0020-09130 SHAFT, I/O VALVE 2 0020-09131 DOOR, I/O VALVE 1 0020-09132 ENCLOSURE, LEFT, I/O VALVE 6 0020-09144 DETECTOR, EXTENSION 3 0020-09285 FLAG HOME SENSOR 1 0020-09293 BRACKET ADJUSTMENT PLATE MOUNT 1 0020-09295 BRACKET, HORIZONTAL PLATE MOUNT 2 0020-09297 BRACKET VERTICAL PLATE MOUNT 11 0020-09359 ENCLOSURE, CHAMBER INTERCONNECT PCB 15 0020-09424 COVER BOTTOM LAMP MODUL 1 0020-09447 CABLE TRAY 6 0020-09461 PLATE, UPPER TRAY ELEV. 150MM 3 0020-09462 SPACER, LEG, CHAMBER 3 0020-09497 BASE, STORAGE ELEVATOR 1 0020-09518 INSULATOR, PCB 5 0020-09545 Filter Slit Window CVD 1 0020-09572 Blank off rack electronic 3 0020-09601 FILTER 1 0020-09628 CONDUIT EXTENSION BOX 3 0020-09629 COVER, GENERATOR CONN HOUSING 1 0020-09634 BRACKET,WINDOW DRIVE ACTUATOR 19 0020-09698 SPRING SPACER 1 0020-09715 MTG. BRACKET COVER SW 11 0020-09759 PANEL ALCATEL TURBO BLANKOFF 4 0020-09807 EDGE PLATE FIXED PANEL 2 0020-09812 EDGE PLATE ACCESS PANEL 8 0020-09816 BRACKET REAR MOUNTING 4 0020-09818 BRACKET FRONT MOUNTING 5 0020-09820 PANEL FILLER 1 0020-09827 PANEL ACCESS 5 0020-09828 BRACKET SUPPORT PNEU-SPRING 4 0020-09843 SLEEVE WAFER LIFT PIN 39 0020-09898 BRACKET HINGE SIDE UPPER 42 0020-09899 BRACKET HINGE SIDE LOWER 1 0020-09911 CARRIER, SPUTTER 14 0020-09912 Lifting Pin Alu 5 0020-09943 PLATE, LOWER TRAY ELEVATOR 50MM 8 0020-10004 COVER, THROTTLE DRIVE 1 0020-10079 CLAMP LEAD SCREW, LIFT 1 0020-10098 PLATE COVER 1CB 4 0020-10157 MANIFOLD GREASE 6 0020-10185 SUPPORT HOOP 200MM 2 0020-10187 CLAMP RING Q WINDOW 200M 2 0020-10191 Blocker plate 1 0020-10192 *RING WAFER LIFT 200MM 1 0020-10200 Cam Follower excentric 2 0020-10357 FACILITIES AC OUTLET 1 0020-10402 PUMPING PLATE 200MM 1 0020-10407 SIDE PANEL 1 0020-10414 AMPULE TEOS DOPANT ENCLOSURE 2 0020-10464 NUT, FEED THRU 1 0020-10527 Sputter pipe 1 0020-10552 PANEL,FACILITIES LOWER 9 0020-10672 HINGE RIGHT GAS PANEL 6 0020-10704 SEAL,THROTTLE VALVE,TEOS 33 0020-10728 Ceramic shield clamp 1 0020-10758 Housing, TC AMP 63 0020-10886 VIS ALU BLOCKER WXZ Courtes Flathead 8 0020-10887 SCREW,SLTD SHLDR #4-40X.125 4 0020-10936 Blocker plate silane 200mm 5 0020-10943 Teflon Isolator 16 0020-10973 BRKLT, L CHMBER CLMP SACVD 16 0020-10975 BRKT,LID CHMBR CLAMP SACVD 9 0020-10976 CLAMP MNT CHMBR CLAMP SACVD 2 0020-13335 COVER GL REAR MCVD COMMON M/F 2 0020-13645 BRACKET UGP DUMP CHC&D 2 0020-13954 PLATE MOUNT 15SLOT ELEVATOR 1 0020-13964 COVER WAFER MAP LED-NB FAST 1 0020-18462 PLATE,LOWER MOTOR,ROBOT EXTENSION 1 0020-18715 INSERT, CHAMBER SLIT VALVE, HDP-CVD, ULT 1 0020-19001 Slit Valve sho spacer 1 0020-19003 INSERT, SLIT VALVE SHO 1 0020-20126 CTA-20126 Stand off, ceramic DC Bias 3 0020-20416 BLANK OFF PLUG EXTEN BOX REMOTE 1 0020-20439 Viewport Cover Buffer orienter 4 0020-20558 BLANK SLIT VALVE 2 0020-20587 INSERT, SLIT VALVE MACHINED 8 0020-20626 BLOCK MOUNTING VALVE 18 0020-20627 BLOCK MOUNTING MFC 3 0020-20672 Pulley, chamber Monolit 4 0020-20699 Clamp AR Flex 8'' Gate Valve 3 0020-20700 Clamp end AR Flex 8'' Gate valve 1 0020-21086 INSULATOR MAG SWITCH CD/PC 1 0020-21251 Turbo support shelf 3 0020-21266 FLAT COVER CHBER INTERC BOARD 4 0020-21366 HTA-21366 Screw shoulder DC Bias 1 0020-21589 SHIELD, LOWER, 200MM SIP TA(N), 190MM T- 1 0020-21664 CTA-21664 Insulator source 13'' 1 0020-21705 FOURCHETTE 6" 1 0020-21706 CHUCK 6" SEE 1 0020-22152 HOLDER MAGNET 13" AL 1 0020-22196 Pedestal 8'' 1 0020-22844 Pedestal Shield, 8'' Preclean 10 0020-22909 PEDESTAL SHIELD 6" PRECLEAN 9 0020-22920 SHIELD PRECLEAN 1 0020-23041 ATA-23041 Clamp Shield 8'' Wafer alu 1 0020-23277 SHIELD LOWER, SST, 8" 101% TIN 2 0020-23278 SHIELD UPPER, SST, 8" 101% TIN 2 0020-23585 Lower Shield G12 8" 1 0020-23593 PLATE, 6" CCD VACUUM SEAL, REVISED 3 0020-23759 Interlock housing PC 2 RF Match 2 0020-23836 Plate Adapter Clamp G-12 1 0020-23951 BLADE 8" SHUTTER 1 0020-24007 BRKT MTG PCB ANALOG SYNC DETECTOR CENTUR 1 0020-24082 Shield 8" Lower 101 G12 6 0020-24384 SHIELD LOWER6" 101 SST/MATL 8 0020-24385 SHIELD UPPER 5/6" 101 SST/MATL 19 0020-24386 COVER RING 6" 101 SST/MATL 14 0020-24387 PEDESTAL 6" 101 SST/MATL 1 0020-24746 SHIELD LOWER HIGH COND 101 AL 8" 6 0020-24898 SHIELD 6" SST 101 AL 1 0020-25077 Lower Shield TiN Wide Body 1 0020-25314 Seal Flange 9 0020-25730 Uppper Shield TiN Wide Body 11 0020-25731 Shield Adapter TiN Wide Body 3 0020-25744 SHIELD LOWER 6" G-12 101 SST 6 0020-26403 COVER RING ESC 6" SST MATL 8 0020-26439 SHIELD LOWER6" G12 101 SST DBL KNEE 8 0020-26583 6" DISK SHUTTER 101 PROCESS 5 0020-26822 OTA-26822 Shield Clamp Alu 1 0020-26899 HEAT SHIELD HTHU HEATER LEFT 1 0020-26900 HEAT SHIELD HTHU HEATER RIGHT 1 0020-27690 """CLAMP RING 8"""" SNNF SHUT COMP 10405 3 0020-27804 Pedestal A101 Hi-Power 3 0020-27819 Cover Ring Advanced 101 Coherent TTN 12 0020-27869 PEDESTAL 6"SMF@C&D MOD FLAT 4 0020-28206 Upper Shield Advanced 101 Coherent TTN 4 0020-28207 Lower Shiel Advanced 101 Coherent TTN 4 0020-28867 Shutter Disk Ti Mat. Adv.101 Coher. TTN 1 0020-29127 BRACKET FLOW SWITCH PVD IMP 2 0020-29217 LIFT Hoop PC II-E 2 0020-30059 Pumping plate, common silane 1 0020-30198 Tube external tapered 1 0020-30287 Adapter ring, Pumping plate 1 0020-30335 HOUSING QTZ TUBE SACVD 4 0020-30347 Cylinder external 2 0020-30703 PLATE, FRONT, UPPER, L.S. ENCLOSURE 1 0020-30704 PLATE,FRONT,LOWER,L.S. ENCLOSURE 2 0020-30797 Perf Plate, common silane, 20 1 0020-30958 Filter Slit window PRSP 1 0020-31164 RING,FOCUSING, ALUM,150 MM, PRSP 3 8 0020-31375 Insulating Flange Etch Vespel 1 0020-31376 FLANGE BASE UNIBODY ETCH CHBER 6 0020-31492 Gas Distribution Plate, 101 H 19 0020-31570 Lift Pin anodized 6 0020-31609 COVER RF SHIELD INTERLCK DELTA SACVD ALU 6 0020-31689 CLAMP,CLEAN SERVICABLE GATE VALVE 1 0020-31737 Insulating flange, taper 3 0020-31739 Carrier, ESC, focus ring 8 0020-31918 Plug DC Sic 1 0020-32028 BRACKET CONTR MODULE BARATRON POSITION C 3 0020-32036 Blocker Plate, CVD TEOS, 12 0020-32047 Post, lower, 2-pieces 1 0020-32048 Post, upper, 2 pieces 1 0020-32365 Filter , UV, Recessed endpoint 8 0020-33328 CLAMP FLANGE 1 0020-33329 BLOCK CLAMP 4 0020-33330 ISOLATOR CLAMP 2 0020-33333 UV Filter 1 0020-33334 COLLAR, DRIVE, HEATER LIFT 1 0020-33538 PLATE, PERF OX 200MM, UNANODIZED 3 0020-33785 GDP MXP 150 3 0020-33899 WAFER LIFT SHIM 200 TEOS FLAT 3 0020-33900 WAFER LIFT SHIM 200 TEOS LIP 8 0020-34040 Lift Pin, simple cathode 8 0020-34041 Lift Pin, simple cathode, Long 3 0020-34113 Insulating Flange MxP+ ARDEL 1 0020-34316 Sheet, interf., soft AL 1100, 0.0003''TK 3 0020-34445 Blocker Plate 1 0020-34468 BRACKET, GAS FEED R2, CHAMBER A-D 2 0020-34606 Blocker plate 1 0020-34617 T/C Amp Mounting Plate 1 0020-34694 Liner, GDP 1 0020-34695 Cathode Liner 1 0020-34697 CAPOT BLANC 19 0020-34719 SCREW LINER TEFLON SIN DXZ 4 0020-34720 SCR NOSE LINER TEFLON SIN DXZ 1 0020-34727 Clamp, ACME Lead Screw, GECO 1 0020-34972 HOOP, 6 INCH, WAFER LIFT, DPS 4 0020-35057 Insert Lla 2 0020-35292 Window endpoint DPS 2 0020-35293 Window Manometer Port DPS 1 0020-35680 CONE, UPPER LAMP MODULE 2 0020-35857 V460 - O-Ring Viton 75 SH 1 0020-36641 BRACKET STRAIN RELIEF UMBILICAL CABLE 1 0020-37076 AIR DUCT, LAMP DRIVER, REM AC BOX 1 0020-38923 Endpoint plug 1 0020-39500 Poignée Lid DxZ 5 0020-40310 PLATE BLANK-OFF 1 0020-40471 PLATE, BLANK-OFF, SOURCE GENERATOR 2 0020-40564 BLANK-OFF POSIT. E/F NON END. 5 0020-40703 KEY COUPLING 2 0020-40705 TOP COVER 7 0020-40711 Bracket wafer detector 7 0020-40923 ROTATION LOCK MANUAL INDEXER 1 0020-42079 Pumping Plate Shadow Ring type 2 0020-42158 BRACKET MFC STABILIZER 1 0020-42284 Blocker plate EC 6'' WXZ 5 0020-42286 Perforated plate EC 6'' WXZ 36 0020-42316 Screw perf plate vented EC Lid 8 0020-42317 Screw blocker EC Lid WXZ 1 0020-44550 DDF3 diaphragm, DDF3 Head Mirra 2 0020-70051 Upon window 4 0020-70053 SECONDARY OPERATION WINDOW EXTRUSION 1 0020-70139 COVER ENCODER INTERFACE BOARD 2 0020-70140 Window 1 0020-70320 BRK REGUL MOUNTIG N2/LLK 7 0020-70487 Manifold, water, Anodized Aluminum 1 0020-70489 MANIFOLD CATHODE J SST 2 0020-70754 PLATE TOP 150MM ELEVATOR 15 SLOT 4 0020-70755 TRAY RH 150MM ELEVATOR 15 SLOT 2 0020-75896 BLOCK NEST CASSETTE 150MM WBLL CMF CENTU 1 0020-76382 BRACKET, EMO SWITCH 2 0020-76569 CLAMP, BASE FRNT WATER LINE FAC I/F CENT 2 0020-76570 CLAMP, HOLD FRNT WATER LINE FAC I/F CENT 2 0020-76571 CLAMP, BASE REAR WATER LINE FAC I/F CENT 3 0020-76912 NBLL BRKT, LED BOARD MOUNT, FAST WAFER 1 0020-77943 Neo 65D Pad Cond Assy o-ring Mirra 8 0020-78177 Robot gasket film Mirra 2 0020-79027 Ext. 260 / L.E. 130 Soufflet cylindrique 2 0020-79080 Shoulder Rotation Gear 3 0020-VK0043 PROTOTIPE BLOCKER PLATE 1 0021-00041 Face Plate SIN 3 0021-02365 Clamp DxZ SACVD 3 0021-02395 INSERT RING, ALUMINUM, DXZ SACVD 8 0021-04305 PIN, Anti-rotation insert, SIN, DXZ 2 0021-06823 TC BRACKET SBT 1 0021-09098 Separator Ring 8 0021-09105 Adjustable Lift Pin assy 1 0021-09718 LINER,SLIT VALVE 2 0021-09723 Carrier, Upper, Heater Lift DxZ 1 0021-09730 Capot lid DxZ 2 0021-09731 Lid, pumping plate, TEOS DxZ 1 0021-09760 Gas Box DxZ Teos 6 0021-09902 Gasket, Thermal ESC, WEB 1 0021-09947 TC AMP Housing 1 0021-10223 Liner chamber EMxP+ 1 0021-17718 SHIELD, INNER, 200MM SIP TA(N), SST, KAC 1 0021-17719 SHIELD, FLOATING, 8" SIP TA/TAN 1 0021-17721 SHIELD CLAMP RING, 200MM SIP TA(N), KACH 10 0021-18728 Screw flat haed 4-40x1/2 SST NI PLAT 21 0021-21900 RING DEPOSITION 6"JMF 9MM ALUM HTE 1 0021-24557 Load cup pad 1 0021-35813 CABLE FLANGE 2 0021-36302 Blocker Perf Silane Nitride 550 1 0021-37149 SHOWER HEAD, CLEANED 4 0021-37408 BRACKET, SPRING, HEATER LIFT, CVD 300 1 0021-37542 GAS LINE SHAFT 1 0021-37876 SUPPORT FLAG 2 0021-37889 MOUNT ACME NUT 300MM UNIVERSAL LIFT 2 0021-37890 BELLOW BRACKET 3 0021-38008 HOUSING TC AMP 300MM 1 0021-38368 COLTRAP FLANGE 4 0021-38369 COLTRAP SCREWS 4 0021-38370 SPRING 1 0021-38399 NUT 1 0021-38426 SBT CHAMBER INSERT 2 0021-38428 BLANK-OFF GAS LINE SBT 5 0021-38429 BLANK-OFF GAS LINE 3 0021-38431 CHAMBER BLANK-OFF 8 0021-38432 CHAMBER BLANK-OFF 4 0021-38433 HANDLE SBT 1 0021-38478 PLATE,LIFT PIN 1 0021-38483 SBT LID PLATE 1 0021-38514 COVER HEATING ELEMENT PLATE 1 0021-39803 COVER, TC AMP 4 0021-39989 Insulator shield faceplate 2 0021-70186 BRKT CROSS MTG/FLO SW 9 0021-77624 Membrane Silicon, special coating 8'' 1 0030-20045 BREAKER 15A-2P 1 0030-70059 INSERT SLIT VALVE MACHINING 2 0030-76004 CONTROL PANEL BEZEL 1 0040-00543 TUBE MOUNTING 1 0040-00555 FRONT SHIELD 1 0040-00556 SIDE SHIELD 1 1 0040-00558 SIDE SHIELD 3 1 0040-00560 REAR SHIELD 1 0040-00571 MOUNTING BRACKET HELIUM CONTROL 4 0040-01045 SHIELD, THERMAL, DPA, LEFT SIDE 4 0040-01046 SHIELD, THERMAL, DPA, RIGHT SIDE 1 0040-01075 Base Connector Heater 1 0040-01304 W/C Adaptor, halogen lamp fixture low te 1 0040-02149 """HEATER, COMMON 8"""" LONG SHAFT ALN - 2 0040-02358 SHORT NOSE SBT BODY 1 0040-02374 COVER SBT 3 0040-02377 SBT SHORT NEWS PANEL 1 0040-09013 PANEL COVER PNEUMATIC MANIFOLD 1 0040-09055 KEYBOARD CASSETTE BEZEL 14 0040-09069 Cable robot assy, P5000 1 0040-09140 ENCLOSURE CAP MONOMETER BRD BW 2 0040-09250 PANEL FAB EXPANDED 1 0040-09264 PLATE COVER EXPANDED RS232 INTERC 1 0040-09343 FRAME, REMOTE PRIMARY DELTA 2 0040-09675 COVER ENCLOSURE 125MM 1 0040-09686 BRACKET,GATE VALVE PCB 3 0040-09797 Shell Assy 200mm 3 0040-09944 BELLOWS GAS LINE W/FLAT 1 0040-13142 Stand, STEC injector, reinforced 1 0040-20068 Bellows lifter PVD 1 0040-20095 ALIGN TOOL FROG LEG ROBOT 1 0040-20165 BRACKET VCR CROSS 2 0040-21178 PCII Belljar 4 0040-21528 Collimator Advanced 101 Coherent TTN 2 0040-21572 Adapter W/B G 12 Flathead 2 0040-22164 HOUSING LAMP HEATER PWR 2 0040-22165 COVER LAMP END 2 0040-22328 BASE PLATE PCII E MATCH MTG 1 0040-22802 Heater Hub Spacer 2 0040-22824 BRKT ANTI-LIFT 6" 9MM HTESC 1 0040-31998 WELDMENT, BELLOWS ASSY, UPPER, DXZ 1 0040-32148 Heater ASSY 1 0040-32712 """HEATER, 8"""" DCSXZ""" 1 0040-35060 SHIELD, TUBE PYROMETER 1 0040-36180 TXZ HEATER 3 0040-36830 MANIFOLD,MIXING 2 0040-36835 SBT CHAMBER COVER 2 0040-36836 SBT BODY CHAMBER 2 0040-36837 COVER HEATED LID SBT 2 0040-36841 LIFT BASE PLATE 3 0040-36849 VACCUM TE 1 0040-37175 PLATE, MTG DRIVER, 300MM 2 0040-37477 PLATE HEATER LIFT LEVELING 300MM UNIVERS 1 0040-37478 BRACKET, MAIN SUPPORT 300MM UNIVERSAL LI 1 0040-38027 WXZ LIFT MECHANISM 1 0040-38789 BELLOW SBT 1 0040-39354 SHORT NOSE SBT CHAMBER 1 0040-39359 HEATING ELEMENT BODY SBT 2 0040-39361 TC PLATE 3 0040-39371 LIFT BRACKET 1 0040-39503 SBT WATER COULD PLATE 2 0040-40048 Centurea LL Door 2 0040-40111 2 SLOT TRAY 200MM NON-ENP 1 0040-61006 INJECTOR SBT BRACKET 1 0040-61007 TC, HEATED LINER, HIGH K CVD 2 0040-70044 BRACE MIDDLE SUPPORT 8 SLOT EXTENDED FRA 3 0040-70071 ENCLOSURE AC OUTLET AMJ 1 0040-70082 BRACKET, LOADER INTERCONNECT PCB 1 0040-75760 PLATE MOURTING RF MATCH 1 0040-76073 SOURCE HINGE 3 0040-77343 Conditioning Flexure Mira 2 0040-BP414 TC HOUSING 1 0050-02099 HPN2 LN, UJR, MFLD TO CH, POS D, MXP+ PH 1 0050-02435 LINE, OUTSIDE/CENTER EPI INJECT, DIST 3 0050-02556 FORELINE EXTENTION MXP+ DCVD CENTURA 2 0050-02989 SBT COOLING PIPE 1 0050-03003 WELDMENT, BARATRON BLOCK,CHAMBER 1 0050-09021 MANIFOLD VACUUM LINE 2 0050-09064 TUBE WLDMNT CHAMBER A 1 0050-09084 GAS SUPPLY TUBING 4 0050-09157 TUBING CHILLED WATER 5 0050-09955 WELDMENT TUBE INSERT 1 0050-10199 WELDMT OUTER LOWER BELLOWS 1 0050-27330 PROC LN, UJR, COM POC TO CH, POS D, MXP+ 1 0050-30396 WELDMT BYPASS GAS MODULE 1 0050-36475 LINE, MAIN OVERPRESSURE 1 0050-75244 Weldment, LFM to injector PLIS 1 0050-75354 FEEDTHRU ADJ AR, MIX 1 0090-02952 Motor encoder assy robot 1 0090-02953 Motor encoder assy robot extension 1 0090-02980 Motor brake encoder assy 1 0090-02981 Motor brake encoder assy 3 0090-09016 FEED THRU ASSY,CAP SENSOR 6 0090-09025 GEN RF 1200W 208V 50/60 5 0090-09069 THERMOCOUPLE CHAMBER BODY,TEOS TEMP CNTR 3 0090-09116 Thermal Electric Driver BD Assy 3 0090-09137 CABLE ASSY, DOOR SW, UHP 3 0090-20232 LAMP ASSY RF/DC POWER INDIC ROTARY GREEN 2 0090-35758 KIT HARNESS DXZ CENTURA 1 0090-36126 SW,VACUUM,75 TORR,VCR-4,CLOSE DECREASING 1 0090-36286 Assy DPA, System Interconnect BD 1 0090-36567 ASSY, RF GEN RACK, 4 CH, DPA, CENTURA 1 0090-40032 SWITCH, CVR INTERLOCK, PWR SUPPY, E 1 0090-70013 ELEC. ASSY THERMAL CIRCUIT BREAKER 15#A 1 0090-76211 CENTURA IOX WITH DUAL SERILPEX BUS 5 0100-00003 VME STEPPER CONTROLLER I 3 0100-00008 TC GAUGE PWB ASSY 1 0100-00011 PWB CHOPPER DRIVE I 1 0100-00014 OPTO DETECT 4 0100-00060 PWB ASSY CHOPPER DRIVEII 1 0100-00084 PCB ASSY CAPACITIVE SENSOR AMP 2 0100-00168 PCB ASSY, RECIPE SELECT INTERCONNECT BOA 3 0100-00171 IND.HELIUM CONTR. BD ASSY 1 0100-00241 PCB ASSEMBLY TC AMP INTERLOCK 300XZ. 1 0100-00259 PCB ASSY,SERIPLEX I/O DISTRIBUTION,GPLIS 1 0100-00328 CHAMBER INTERCONNECT B,D CENTURA 1 0100-00329 CHAMBER INTERCONNECT A,C CENTURA 2 0100-00825 ASSY PCB AIO WITH NO A/D CONVERTER 1 0100-01321 ASSY PCB DIGITAL I/O DIO BD 1 0100-09006 PCB ASSY, INTELLIGENT INTERFACE SBC 1 0100-09009 PCB BUFFER I/O BOARD 1 0100-09010 wPCB ASSY, BACKPLANE SYSTEM ELECTRICAL 1 0100-09011 PCB ASSY AI MUX 2 0100-09017 CH Interconnect BOARD 1 0100-09020 PCB ASSY, FUSE BOARD 4 0100-09040 PCB ASSY, SSR AC CONTROL 18 0100-09042 PCB ASSY OPTO SWITCH (H21B1° 2 0100-09050 PCB ASSY OZONATOR DISTRI 2 0100-09054 PCB ASSY, ANALOG INPUT 2 0100-09055 PCB ASSY LIQUID SOURCE SBC 1 0100-09099 CHAMBER INTERCONNECT BOARD 1 0100-09102 PCB ASSY CONTROLLER DISTRIBUTION 3 0100-09106 PCB ASSY EXTENDED GAS PANEL 4 0100-09107 PCB ASSY TEOS GAS INTERFACE 1 0100-09109 PCB ASSY K-TYPE TC AMP 1 0100-09114 Gas Panel Board 1 0100-09134 PCB ASSY DIDO FUSE 1 0100-09139 ASSY ROBOT EXTENSION SENSOR PCB 2 0100-09145 PCB ASSY, RS232 VIDEO INTERCONNECT 3 0100-09153 PCB,GAS PANEL INTERFACE W/O STANDOFFS 3 0100-09158 wPCB ASY,CHMBR INTERCONN (STRIP) 2 0100-09161 wASSY, EXPANDED RS-232 INTERCONNECT PCB 1 0100-09165 ASSY HIGH TEMP INTERFACE BD HEAT EXCHANG 3 0100-09196 PCB ASSY,E CHUCK CONTROLLER 1 0100-09212 ASSY ES CONTR BACKPLANE 1 0100-09224 PCB ASSY EXPANDED RS232 INTERCONNECT 1 0100-09225 PCB assy, TC Amp Interlock 2 0100-09226 PCB ASSY,ENDPOINT,WCVD 2 0100-09237 VME TO DUAL FREQ. INTERCONECT BOARD 2 0100-09245 PCB ASSY, 2PH STEP M DRIVER INTF BD 1 0100-09286 CEN APC 2-SLT BK PL BD 1 0100-09287 CENTURA APC MATRIX BD 2 0100-09293 ASSEMBLY, DRAWING, LI/APC MATRIX BD 2 0100-09299 Assy, serial side board 3 0100-09304 ASM PCB 5000 SYST WIRING 2 0100-09304MONT ASSY Wiring distribution + Relay Board 1 0100-09305 PCB, ASSY, RELAY INTERLOCK BOARD 1 0100-09322 ASSY, OZONATOR DISTRIBUTION PCB 1 0100-09362 PCB assy Piggyback Bd, DPA 2 0100-11001 w PWB, ANALOG OUTPUT 4 0100-11002 DIGITAL I/O PWB ASSY 2 0100-14004 PCB,VME EXTENDER ASSY 1 0100-18034 PCBA, CHB PNEUMATIC INTC,ULTIMA 1 0100-18040 PCBA,CHAMBER TRAY ULTIMA,POSITION A/C 10 0100-20003 OBS DIGITAL INPUT OUTPUT PCB 1 0100-20038 PCB ASSY, RELAY CONTROL 1 0100-20039 RF GENE BACKPLANE 6 0100-20040 PCB ASSY REMOTE SUPPLY DIST 1 0100-20049 wPCB ASSY,HEAT EXCHANGER DISTRIBUTION 1 0100-20051 PCB ASSY TURBO INTERCON 1 0100-20055 wPCB ASSY, BLOWOUT VALVE INTERCONNECT 1 0100-20059 PCB ASSY, PUMP FRAME DISTRIBUTION 1 0100-20066 PCB ASSY ANALOG SYNK DEC 1 0100-20067 PCBA Stepper controller 1 0100-20069 OBS,PCB WAFER ORIENTER 2 0100-20073 PCB ASSY WAFER DETECTOR 1 0100-20083 PCB ASSY, CRYO TEMP/AI MUX BOARD 2 0100-20100 PCB ASSY, ANALOG INPUT/OUTPUT 1 0100-20177 PCB ASSY WATER SMOKE DEC 1 0100-20232 PCB, GEN RACK EXPANSION BACKPLANE 1 0100-20313 CHAMBER INTERCONNECT PCB 1 0100-35024 ASSY PCB CENTERFINDER SBC 1 0100-35059 PCB ASSY REMOTE DIST 1 0100-35064 ASSY PCB AC DIST 1 0100-35067 MAINFR PNEUM INTERC BOARD 10 0100-35102 PCB ASSY STEC MFC ADAPTOR METCH MXP 1 0100-35116 ASSY,CHAMBER INTERCONNECT,POS A-C 4 0100-35124 PCB, SERIPLEX I/O Distribution 1 0100-35127 PCB ASSY,PLIS-O3 I/O DISTRIBUTION 1 0100-35174 CENTURA APC MATRIX BOARD 1 0100-35231 PCB ASSEMBLY, SERIPLEX I/O DISTRIBUTION, 1 0100-35277 OBS ASSY, PCB, TC AMP INTERLOCK 1 0100-38116 PCB Assy WxZ High Pressure interlock 1 0100-40004 wPCBA PERSONALITY