EDWARDS E306A Products

  • EDWARDS: E306A

    Details
    ID#:
    9019787
    Category:
    Sputtering Systems
    Sputtering / coating system.
  • EDWARDS: E306A

    Details
    ID#:
    189372
    Category:
    Evaporators
    Wafer Size:
    4" 
    Evaporator, 4" | Base pressure: 5-8 x 10-6 Torr | Unit uses a rotary diffusion pump combination | Chamber size: 12” diameter cylinder, 14” in height | Process: platinum evaporation | E-beam source | Single 4" wafer holder suspended from lid and without rotation | Low vacuum roughing pump | Thickness monitor | EDWARDS 5 Mechanical pump | Currently de-installed.
  • EDWARDS: E306A

    Details
    ID#:
    126420
    Category:
    Evaporators
    Vacuum evaporator.
  • EDWARDS: 19E

    Details
    ID#:
    70869
    Category:
    Evaporators
    Vacuum evaporator. The 19" dia x 24" H ss bell jar has two 4" dia viewports on the side and one air-release valve. The top has one 1.5" blanked off port and one 4" viewport. The three 4" ports and the waist of the bell jar are water traced. The bell jar has a hydraulic hoist and seals onto a 20" dia steel plated baseplate with fourteen 1" dia feedthrough holes. A 4" high ss feedthrough collar with 16 feedthrough holes is also included. Feedthroughs include: two low voltage, water cooled high current type, three high voltage medium current type, and one octal instrument type. The pumping system of one 23 CFM mechanical pump and one Edwards F903 diffusion (1500 l/s). Manual and electric solenoid valves are used throughout the system. This system includes one, Variac controlled, 3.4 kva filament power supply with output power at 10 volts and one Variac controlled 1 kva filament power supply with output power 10 or 20 volts. A spare bell jar is also available.
  • EDWARDS: 3000 E

    Details
    ID#:
    159100
    Category:
    Leak Detectors
    Helium leak detector | Includes (2) Edwards vacuum pumps (28 m3/hr) | Unit was shut down Q2 2011.
  • EDWARDS: Lot

    Details
    ID#:
    9008254
    Category:
    Pumps
    Lot of Edwards Vacuum Parts: | | (2) A59040946 MODEL IH1800, DRY VACUUM PUMP (PROCESS PUMP) | (2) A65501905 RV12, ROTARY VANE PUMP | (2) NRY1THOOO MODEL E2M175 / EH500, PUMPING SYSTEM (VACUUM / ROUGHING PUMP) | (4) B426-03-000 QSB100P QUARTER SWING BUTTERRFLY VALVE, PNEUMATIC | (4) C414-15-000 PV40PKS PNEUMATIC OPERATION ISOLATION VALVE | (2) C413-15-000 PV25PKS PNEUMATIC OPERATION ISOLATION VALVE | (2) D374-23-000 iTIM MCM/L1 + SERIAL TOOL INTERFACE | (2) A462-26-000 OIL MIST FILTER | (2) A50597000 EXHAUST SILENCER | (2) B428-03-000 QSB160P QUARTER SWING BUTTERRFLY VALVE, PNEUMATIC.
  • EDWARDS: IQDP40

    Details
    ID#:
    136415
    Category:
    Pumps
    Pump package with EDWARDS QMB 250.
  • EDWARDS / EBARA: Lot

    Details
    ID#:
    9050347
    Category:
    Pumps
    Lot of Ebara / Edwards pumps: | | (5) EBARA A30W | (5) EBARA A10S | (1) EDWARDS iL600 | (1) EDWARDS IL70 | (1) EDWARDS IL70N | (1) EDWARDS iQDP40 | (6) EDWARDS QDP40 | (1) EDWARDS QDP80 | (2) EDWARDS QDP40 / 250 | (1) EDWARDS QDP80 / OMV250 | (2) EDWARDS QDP80 / QMB500.
  • EDWARDS: E306

    Details
    ID#:
    94348
    Category:
    Evaporators
    Vacuum evaporator with pumps and fixturing | Unit has bell jar with multiple feed throughs and rotation | Diffusion pumped with EDWARDS 2-stage backing pump | Unit was previously used for doing Cr/Au or Ni-Cr/Au | System's thermal source inputs were modified and hooked up with a heavy ARC welder power supply for lots of power | Jar is cracked.
  • EDWARDS: E306

    Details
    ID#:
    19187
    Category:
    Evaporators
    Box chamber | 4" Diffstak | Manual valve | 12" Bell jar chamber on modular base plate | E2M8 backing pump | Gauging | LT circuitry | EUR power input | The fixing kit has the seal and the clamps for the interface | System: | with diffusion pumping system, Edwards RV8, (8m3/hr) dual stage rotary pump, bell jar chamber. The vacuum chamber is mounted on top of the Edwards base plate and an implosion guard aids safety. Vacuum control will be via a manual high vacuum valve actuated from the front face of the evaporator frame. An active strain cold cathode type vacuum gauge will report chamber vacuum levels, whilst a pirani gauge will report backing / roughing vacuum levels. Interlocks will be provided for vacuum and cabinet doors. | Chamber: | The chamber will be based on the standard Edwards 360mm high glass bell jar which has to be lifted from the base plate to allow for access to the sample / techniques. A glass cylinder and top plate chamber is optional. An implosion guard is fitted over the bell jar. | Vacuum: | Ultimate vacuum specification of the system will be 1 x 10-6 mbar without the addition of liquid nitrogen to the cryo panel | Source shutter: | One manual source shutter, (operated from a mechanical lever on the left side of the base plate collar). Control is via the SQM160. | Process control: | Inficon SQM-160 thin film monitor complete with download software suite (Windows based). Also included here is one crystal head(s) with oscillator and cable set(s), RS232 cable and PC software. The SQM160 will interface to the source shutter. | TE4 thermal source: | Four discrete crucible / filament resistive evaporator with manual crucible selection via the Edwards control unit. The source is water cooled (option) and the electrical feed through kit provides power to the device. The source has cross contamination shielding, 400A rated feed through and 100A rated connection cables. Source PSU is the existing Edwards E306 unit. | Consumables: | Qty 5 Tungsten basket | Options: | Glow discharge | Thermal evaporation | E-beam deposition | Sample heating / cooling | Thin film monitor | Motorized shutters | 8-Sample rotation stage and cylinder chamber upgrade | Plasma Glo bar | ARDK-8 sample rotation stage and cylinder chamber upgrade | A glass cylinder and top plate chamber | Turbo molecular pump conversion | MiniBox front loading chamber upgrade | MiniBox shielding | MiniBox fixing kit | Step up transformer 120vac/60hz/1p input, 300VA rated.
  • BOC EDWARDS: Auto 500

    Details
    ID#:
    9073803
    Category:
    Evaporators
    Thermal Resistance Evaporator Coater | Turbo Pump: Edwards EXT 255H / ISO 100K, P/N: B75301000S | Turbo Pump Controller: Edwards EXC 300 | Foreline Trap: Edwards FL20K | Vacuum Valve: Edwards PV25EKA | Rotary Vane Vacuum Pump: Edwards RV12 | Source Controls: (2) Dual Edwards Thyristor | Controller Modules: (2) Dual Edwards LT/HT with LT Transformer and HT Power Supply | Bell Jar: not included.
  • EDWARDS: QDP80

    Details
    ID#:
    70418
    Category:
    Pumps
    Pumps.
  • EDWARDS: QDP40

    Details
    ID#:
    70419
    Category:
    Pumps
    pumps.
  • EDWARDS: DP80

    Details
    ID#:
    70417
    Category:
    Pumps
    pumps.
  • EDWARDS: QMB250

    Details
    ID#:
    67422
    Category:
    Pumps
    Booster pumps, many available.
  • EDWARDS: QDP80

    Details
    ID#:
    70162
    Category:
    Pumps
    Pumps with acoustic enclosure, LN2 lines capped off | Comes with manual, oil charge and connection fittings | Pump can be set up for 208 or 415V.
  • EDWARDS: 175

    Details
    ID#:
    32765
    Category:
    Pumps
    vacuum pump.
  • EDWARDS: RV12

    Details
    ID#:
    164628
    Category:
    Pumps
    Vacuum pump | 220v, 10 cfm, 3 phase motor.
  • EDWARDS: iQDP80 / QMB500

    Details
    ID#:
    65924
    Category:
    Pumps
    Dry pump with blower package.
  • EDWARDS: E2M18

    Details
    ID#:
    164052
    Category:
    Pumps
    High vacuum pumps.
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