中古 ASML XT 1250 #9191912 を販売中

Stepper, 8" Wafer type: Notch Laser model: GIGAPHOTON GT42A4 (20W) Laser type: GIGAPHOTON Laser FAT Attendance OIU / Reticle wafer aux port: Left configuration CSR's for XT1250B various: CSR 7603 FOUP Machine door sensor: No PPD IRIS (CSR): No CSR (AT Multilingual UI): No Pellicle safeguard (CSR): No CSR (LS M2M P2P): No Active contrast control: No Quasar: No WH Carrier interface: (25) Wafers open cassette kit Wafer track interface: SOKUDO RF3/200 Mark sensor Integrated reticle library: No IRIS-6 Inch reticles twinscan: No DOE ID12 Low sigma DOE MP2 35-X: No DOE MP2 35-Y: No DOE ID5 MP4 30-45: No DOE ID2 MP4 20-45: No Reticle CIDRW (Tag reader): No FOUP Lockout system: No DOE ID6 High sigma Chuck dependent correction (CSR): No Image streaming: Standard Second laser paddle: No CD-FEC: Standard Lithoguide ILIAS: Standard Wafer ID reader: No MDL View: Site view Athena narrow marks: Standard Reticle barcode reader Focus spot monitor: Standard Reorder lot service: No UNIVERSAL Prealignment: No Recipe creator Quasar XL: Standard Automated reticle transport: No Lot overhead reduction: LOR-2 / Standard Machine specification for SWkey: B Quasar XL: Standard Dose mapper: Standard Top package: Standard on XT:1400 (Top 2) PEP for AT 1200B: No PEP package DOE ID28 MP5 Soft quasar: No DOE ID18 MP2 40-Y: No DOE ID19 MP2 40-X: No DOE ID31 MP4 40-45: No DOE ID14 MP4 60-45: No DOE ID21 MP4 45: No EFESE: No CSR L1L7 Type_1: No ASF LS area extension: No DOE ID9 MP4 20: No IRIS Feature scan: No Reticle shape correction Twinscan wafer switch DOE ID8 MP2 90-X: No DOE ID7 MP2 90-Y: No DOE ID13 MP4 30: No PupMeas with ILIAS: No CSR Proximity matching: No ExpoSure: No NA Extension / Diaphragm limiter: No DOE ID29 MP2 60-X: No DOE ID30 MP2 60-Y: No Chemical sampling ports: No ASF (LS Spot Coverage): No System perf indicators focus: No Equipment constants: No BAM (Bandwidth analysis module): No DOE ID20 Ultra low sigma: No 2D Barcode reader: No ASF (E-chuck Flatness Qualification): No Wait watcher: No Reticle streaming: No Best uniformity settings (BUSS): No Grid mapper Chuck dedication: No Spot less: No Module name Last value Status Unit Limit Total shot 15825.9 - Mpulse - Chamber 4344.8 36% Mpulse 12000 L/N Module 4345.9 31% Mpulse 14000 Fronut mirror 2260.7 16% Mpulse 14000 Monitor module 7443.7 74% Mpulse 10000 HG Lamp 6113 3% Cycle 200000 F2 Trap (C) 96.62 97% Cycle 100 F2 Trap (T) 5789.8 33% Hour 17520 Excimer shutter 356890 12% Cycle 3000000 Power: 400 V.